JPS5997469U - Semiconductor chip measurement probe - Google Patents

Semiconductor chip measurement probe

Info

Publication number
JPS5997469U
JPS5997469U JP19259382U JP19259382U JPS5997469U JP S5997469 U JPS5997469 U JP S5997469U JP 19259382 U JP19259382 U JP 19259382U JP 19259382 U JP19259382 U JP 19259382U JP S5997469 U JPS5997469 U JP S5997469U
Authority
JP
Japan
Prior art keywords
semiconductor chip
measurement probe
chip measurement
conductor
probe
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP19259382U
Other languages
Japanese (ja)
Inventor
坂本 雅文
Original Assignee
株式会社東芝
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社東芝 filed Critical 株式会社東芝
Priority to JP19259382U priority Critical patent/JPS5997469U/en
Publication of JPS5997469U publication Critical patent/JPS5997469U/en
Pending legal-status Critical Current

Links

Landscapes

  • Testing Of Individual Semiconductor Devices (AREA)
  • Measuring Leads Or Probes (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。
(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of drawings]

第1図は、従来の半導体チップ測定用探針の使用状態を
示す説明図、第2図は、同半導体チップ測定用探針の要
部を示す説明図、第3図A、本考案の一実施例の断面図
、同図Bは、同実施例の要部のB−B線に沿う断面図で
ある。 10・・・半導体チップ測定用探針、11・・・内部導
体、12・・・絶縁体層、13・・・外部導体。
FIG. 1 is an explanatory diagram showing the state of use of a conventional probe for measuring semiconductor chips, FIG. 2 is an explanatory diagram showing the main parts of the probe for measuring semiconductor chips, and FIG. A sectional view of the embodiment, Figure B is a sectional view taken along line BB of the main part of the embodiment. DESCRIPTION OF SYMBOLS 10... Semiconductor chip measurement probe, 11... Inner conductor, 12... Insulator layer, 13... Outer conductor.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 略棒状の内部導体の外層に絶縁体層を介して外部導体を
設けてなることを特徴とする半導体チツ
A semiconductor chip characterized in that an outer conductor is provided on the outer layer of a substantially rod-shaped inner conductor with an insulating layer interposed therebetween.
JP19259382U 1982-12-20 1982-12-20 Semiconductor chip measurement probe Pending JPS5997469U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19259382U JPS5997469U (en) 1982-12-20 1982-12-20 Semiconductor chip measurement probe

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19259382U JPS5997469U (en) 1982-12-20 1982-12-20 Semiconductor chip measurement probe

Publications (1)

Publication Number Publication Date
JPS5997469U true JPS5997469U (en) 1984-07-02

Family

ID=30414434

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19259382U Pending JPS5997469U (en) 1982-12-20 1982-12-20 Semiconductor chip measurement probe

Country Status (1)

Country Link
JP (1) JPS5997469U (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61187244A (en) * 1985-02-14 1986-08-20 Matsushita Electronics Corp Equipment for estimating semiconductor device
JPH0187256U (en) * 1987-12-01 1989-06-08

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61187244A (en) * 1985-02-14 1986-08-20 Matsushita Electronics Corp Equipment for estimating semiconductor device
JPH0187256U (en) * 1987-12-01 1989-06-08

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