JPS5997469U - Semiconductor chip measurement probe - Google Patents
Semiconductor chip measurement probeInfo
- Publication number
- JPS5997469U JPS5997469U JP19259382U JP19259382U JPS5997469U JP S5997469 U JPS5997469 U JP S5997469U JP 19259382 U JP19259382 U JP 19259382U JP 19259382 U JP19259382 U JP 19259382U JP S5997469 U JPS5997469 U JP S5997469U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor chip
- measurement probe
- chip measurement
- conductor
- probe
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Testing Of Individual Semiconductor Devices (AREA)
- Measuring Leads Or Probes (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第1図は、従来の半導体チップ測定用探針の使用状態を
示す説明図、第2図は、同半導体チップ測定用探針の要
部を示す説明図、第3図A、本考案の一実施例の断面図
、同図Bは、同実施例の要部のB−B線に沿う断面図で
ある。
10・・・半導体チップ測定用探針、11・・・内部導
体、12・・・絶縁体層、13・・・外部導体。FIG. 1 is an explanatory diagram showing the state of use of a conventional probe for measuring semiconductor chips, FIG. 2 is an explanatory diagram showing the main parts of the probe for measuring semiconductor chips, and FIG. A sectional view of the embodiment, Figure B is a sectional view taken along line BB of the main part of the embodiment. DESCRIPTION OF SYMBOLS 10... Semiconductor chip measurement probe, 11... Inner conductor, 12... Insulator layer, 13... Outer conductor.
Claims (1)
設けてなることを特徴とする半導体チツA semiconductor chip characterized in that an outer conductor is provided on the outer layer of a substantially rod-shaped inner conductor with an insulating layer interposed therebetween.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP19259382U JPS5997469U (en) | 1982-12-20 | 1982-12-20 | Semiconductor chip measurement probe |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP19259382U JPS5997469U (en) | 1982-12-20 | 1982-12-20 | Semiconductor chip measurement probe |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5997469U true JPS5997469U (en) | 1984-07-02 |
Family
ID=30414434
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP19259382U Pending JPS5997469U (en) | 1982-12-20 | 1982-12-20 | Semiconductor chip measurement probe |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5997469U (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61187244A (en) * | 1985-02-14 | 1986-08-20 | Matsushita Electronics Corp | Equipment for estimating semiconductor device |
JPH0187256U (en) * | 1987-12-01 | 1989-06-08 |
-
1982
- 1982-12-20 JP JP19259382U patent/JPS5997469U/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61187244A (en) * | 1985-02-14 | 1986-08-20 | Matsushita Electronics Corp | Equipment for estimating semiconductor device |
JPH0187256U (en) * | 1987-12-01 | 1989-06-08 |
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