JPH0187256U - - Google Patents
Info
- Publication number
- JPH0187256U JPH0187256U JP18194487U JP18194487U JPH0187256U JP H0187256 U JPH0187256 U JP H0187256U JP 18194487 U JP18194487 U JP 18194487U JP 18194487 U JP18194487 U JP 18194487U JP H0187256 U JPH0187256 U JP H0187256U
- Authority
- JP
- Japan
- Prior art keywords
- probe
- probe body
- pin
- insulator
- current supply
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000523 sample Substances 0.000 claims description 24
- 238000005259 measurement Methods 0.000 claims description 5
- 239000012212 insulator Substances 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
Landscapes
- Measuring Leads Or Probes (AREA)
- Measurement Of Resistance Or Impedance (AREA)
Description
第１図は本考案に係る抵抗測定用プローブを示
す斜視図、第２図はプローブピンを示す縦断面図
、第３図はプローブピンとプローブ本体との接続
部を示す横断面図、第４図は四端子法について説
明するための電気回路図、第５図は従来の抵抗測
定用プローブを示す斜視図である。
１２……プローブ本体、１４……プローブピン
、１５……電流供給用プローブ本体、１６……電
圧測定用プローブ本体、２１……外プローブピン
、２３……内プローブピン。
Fig. 1 is a perspective view showing a resistance measuring probe according to the present invention, Fig. 2 is a longitudinal sectional view showing the probe pin, Fig. 3 is a transverse sectional view showing the connection between the probe pin and the probe body, and Fig. 4. 5 is an electric circuit diagram for explaining the four-terminal method, and FIG. 5 is a perspective view showing a conventional resistance measuring probe. 12...Probe body, 14...Probe pin, 15...Probe body for current supply, 16...Probe body for voltage measurement, 21...Outer probe pin, 23...Inner probe pin.
Claims (1)
ピンを接続した抵抗測定用プローブにおいて、プ
ローブ本体を電流供給用プローブ本体および電圧
測定用プローブ本体から構成しこれら部材を絶縁
体を介して厚さ方向に積層すると共に、プローブ
ピンを円筒状の外プローブピンおよびこれに絶縁
体を介して挿入された内プローブピンから構成し
、これら内外プローブピンの一方を電流供給用プ
ローブ本体に接続し他方を電圧測定用プローブ本
体に接続したことを特徴とする抵抗測定用プロー
ブ。 In a resistance measurement probe in which a probe pin that contacts the side to be measured is connected to the probe body, the probe body is composed of a current supply probe body and a voltage measurement probe body, and these members are connected in the thickness direction through an insulator. The probe pin is composed of a cylindrical outer probe pin and an inner probe pin inserted through an insulator, and one of these inner and outer probe pins is connected to the probe body for current supply, and the other is used for voltage measurement. A resistance measurement probe characterized by being connected to the probe body.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987181944U JPH0611464Y2 (en) | 1987-12-01 | 1987-12-01 | Resistance measurement probe |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987181944U JPH0611464Y2 (en) | 1987-12-01 | 1987-12-01 | Resistance measurement probe |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0187256U true JPH0187256U (en) | 1989-06-08 |
| JPH0611464Y2 JPH0611464Y2 (en) | 1994-03-23 |
Family
ID=31473406
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987181944U Expired - Lifetime JPH0611464Y2 (en) | 1987-12-01 | 1987-12-01 | Resistance measurement probe |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0611464Y2 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009156737A (en) * | 2007-12-27 | 2009-07-16 | Fujitsu Microelectronics Ltd | Inspection jig and electrostatic capacitance measuring method using it |
| JP2014055879A (en) * | 2012-09-13 | 2014-03-27 | Hioki Ee Corp | Substrate inspection device and substrate inspection method |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5741169U (en) * | 1980-08-20 | 1982-03-05 | ||
| JPS5768046A (en) * | 1980-10-16 | 1982-04-26 | Nec Corp | Probe card |
| JPS5997469U (en) * | 1982-12-20 | 1984-07-02 | 株式会社東芝 | Semiconductor chip measurement probe |
| JPS62217165A (en) * | 1986-03-19 | 1987-09-24 | Toshiba Corp | Contact body for inspection |
-
1987
- 1987-12-01 JP JP1987181944U patent/JPH0611464Y2/en not_active Expired - Lifetime
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5741169U (en) * | 1980-08-20 | 1982-03-05 | ||
| JPS5768046A (en) * | 1980-10-16 | 1982-04-26 | Nec Corp | Probe card |
| JPS5997469U (en) * | 1982-12-20 | 1984-07-02 | 株式会社東芝 | Semiconductor chip measurement probe |
| JPS62217165A (en) * | 1986-03-19 | 1987-09-24 | Toshiba Corp | Contact body for inspection |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009156737A (en) * | 2007-12-27 | 2009-07-16 | Fujitsu Microelectronics Ltd | Inspection jig and electrostatic capacitance measuring method using it |
| JP2014055879A (en) * | 2012-09-13 | 2014-03-27 | Hioki Ee Corp | Substrate inspection device and substrate inspection method |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0611464Y2 (en) | 1994-03-23 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPH0187256U (en) | ||
| JPH032265U (en) | ||
| JPS6358757U (en) | ||
| JPS62146970U (en) | ||
| JPS6329748U (en) | ||
| JPH0463591U (en) | ||
| JPS62115674U (en) | ||
| JPH01180773U (en) | ||
| JPS62156884U (en) | ||
| JPS62152268U (en) | ||
| JPS629174U (en) | ||
| JPH0174578U (en) | ||
| JPS60185217U (en) | Multi-purpose sensor | |
| JPS613473U (en) | Contact for low resistance measurement | |
| JPH01132975U (en) | ||
| JPH02128963U (en) | ||
| JPS6310459U (en) | ||
| JPS6152270U (en) | ||
| JPS63105873U (en) | ||
| JPS6196372U (en) | ||
| JPS62141764U (en) | ||
| JPS62166821U (en) | ||
| JPS62128374U (en) | ||
| JPH02131664U (en) | ||
| JPS62126761U (en) |