JPH0215734U - - Google Patents
Info
- Publication number
- JPH0215734U JPH0215734U JP9429188U JP9429188U JPH0215734U JP H0215734 U JPH0215734 U JP H0215734U JP 9429188 U JP9429188 U JP 9429188U JP 9429188 U JP9429188 U JP 9429188U JP H0215734 U JPH0215734 U JP H0215734U
- Authority
- JP
- Japan
- Prior art keywords
- fixed card
- fixed
- prober
- testers
- semiconductor wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
Landscapes
- Testing Of Individual Semiconductor Devices (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Description
第１図はこの考案の一実施例を示す構成図、第
２図はその部分構成図、第３図は従来装置の構成
図である。
図中、１０，１１はテスタ、４０は固定カード
、５０はプローバである。なお、各図中、同一符
号は同一又は相当部分を示す。
FIG. 1 is a block diagram showing an embodiment of this invention, FIG. 2 is a partial block diagram thereof, and FIG. 3 is a block diagram of a conventional device. In the figure, 10 and 11 are testers, 40 is a fixed card, and 50 is a prober. In each figure, the same reference numerals indicate the same or equivalent parts.
Claims (1)
できる固定カード、この固定カードの各チツプ測
定部毎に個別にケーブルを介して接続された複数
台のテスタを備えた半導体ウエハテスト装置。 A semiconductor wafer test device includes a fixed card fixed on a prober and capable of simultaneously measuring multiple chips, and a plurality of testers individually connected via cables to each chip measuring section of the fixed card.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9429188U JPH0215734U (en) | 1988-07-15 | 1988-07-15 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9429188U JPH0215734U (en) | 1988-07-15 | 1988-07-15 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0215734U true JPH0215734U (en) | 1990-01-31 |
Family
ID=31318800
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9429188U Pending JPH0215734U (en) | 1988-07-15 | 1988-07-15 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0215734U (en) |
-
1988
- 1988-07-15 JP JP9429188U patent/JPH0215734U/ja active Pending