JPS6367884U - - Google Patents
Info
- Publication number
- JPS6367884U JPS6367884U JP9432786U JP9432786U JPS6367884U JP S6367884 U JPS6367884 U JP S6367884U JP 9432786 U JP9432786 U JP 9432786U JP 9432786 U JP9432786 U JP 9432786U JP S6367884 U JPS6367884 U JP S6367884U
- Authority
- JP
- Japan
- Prior art keywords
- contact
- semiconductor
- test
- center conductor
- coaxial line
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 4
- 239000004020 conductor Substances 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Testing Of Individual Semiconductor Devices (AREA)
Description
第１図は本考案の一実施例を示す構成説明図、
第２図は従来の装置の一例を示す構成説明図であ
る。
１……テスト対象半導体装置（ＤＵＴ）、２…
…テストヘツド、３……レール、５……コネクタ
、６……信号ケーブル、７……連結部材、８……
駆動体、９……接触子（中心導体）、１０……同
軸線路。
FIG. 1 is a configuration explanatory diagram showing an embodiment of the present invention;
FIG. 2 is a configuration explanatory diagram showing an example of a conventional device. 1... Semiconductor device under test (DUT), 2...
...Test head, 3...Rail, 5...Connector, 6...Signal cable, 7...Connecting member, 8...
Driver, 9... contact (center conductor), 10... coaxial line.
Claims (1)
導体装置のピンに選択的に圧接されテスト信号の
授受を行う接触子を有する半導体テスト装置にお
いて、前記接触子が同軸線路の中心導体で形成さ
れたことを特徴とする半導体テスト装置。 A semiconductor test device having a contact that is selectively pressed against a pin of a semiconductor device under test packaged in a predetermined case and transmits and receives a test signal, characterized in that the contact is formed of a center conductor of a coaxial line. Semiconductor test equipment.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9432786U JPS6367884U (en) | 1986-06-20 | 1986-06-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9432786U JPS6367884U (en) | 1986-06-20 | 1986-06-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6367884U true JPS6367884U (en) | 1988-05-07 |
Family
ID=30957672
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9432786U Pending JPS6367884U (en) | 1986-06-20 | 1986-06-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6367884U (en) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61107168A (en) * | 1984-10-31 | 1986-05-26 | Hitachi Ltd | Probe for low temperature |
| JPS61187244A (en) * | 1985-02-14 | 1986-08-20 | Matsushita Electronics Corp | Equipment for estimating semiconductor device |
-
1986
- 1986-06-20 JP JP9432786U patent/JPS6367884U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61107168A (en) * | 1984-10-31 | 1986-05-26 | Hitachi Ltd | Probe for low temperature |
| JPS61187244A (en) * | 1985-02-14 | 1986-08-20 | Matsushita Electronics Corp | Equipment for estimating semiconductor device |