JPS61136541U - - Google Patents
Info
- Publication number
- JPS61136541U JPS61136541U JP1876685U JP1876685U JPS61136541U JP S61136541 U JPS61136541 U JP S61136541U JP 1876685 U JP1876685 U JP 1876685U JP 1876685 U JP1876685 U JP 1876685U JP S61136541 U JPS61136541 U JP S61136541U
- Authority
- JP
- Japan
- Prior art keywords
- test head
- test
- head
- relay
- test device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000003990 capacitor Substances 0.000 claims description 2
- 239000000523 sample Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Testing Electric Properties And Detecting Electric Faults (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Description
第１図ａ，ｂ、第２図は本考案による一実施例
を示し、第１図ａ及び第２図は本考案によるテス
トヘツドの断面図、第１図ｂは本考案によるテス
トヘツドの背面図、第３図は従来のテストヘツド
とプローバとの接続の様子を示した図である。
１……テストヘツド、２……ピンカード、３…
…入出力ピン、４……ロードボード、５……接触
子、６……インターフエースボード、７……テス
トヘツド背面、８……テストヘツド空胴部、９…
…リレー、１０……配線、１１……チエツク端子
、１２……並列接続の抵抗、コンデンサ、１３…
…ＤＵＴボード、１４……接続線、１５……中継
ボード、１６……プローブカード、１７……プロ
ーブニードル、１８……ウエハ、１９……ウエハ
ステージ。
1a, b and 2 show an embodiment of the present invention; FIGS. 1a and 2 are cross-sectional views of the test head according to the present invention; FIG. 1b is a rear view of the test head according to the present invention; FIG. 3 is a diagram showing the connection between a conventional test head and a prober. 1...Test head, 2...Pin card, 3...
...I/O pin, 4...Load board, 5...Contact, 6...Interface board, 7...Test head back, 8...Test head cavity, 9...
...Relay, 10... Wiring, 11... Check terminal, 12... Parallel connected resistor, capacitor, 13...
...DUT board, 14... Connection wire, 15... Relay board, 16... Probe card, 17... Probe needle, 18... Wafer, 19... Wafer stage.
Claims (1)
結構造の試験装置において、被試験チツプとテス
トヘツド内のドライバ回路とコンパレータ回路と
の接続線にテストヘツド背面に設けたチエツク端
子を、リレーもしくは並列接続した抵抗、コンデ
ンサを介して接続したことを特徴とする試験装置
のテストヘツド。 In a test device with a direct connection structure in which the test head is covered with a wafer prober, the check terminal provided on the back of the test head is connected to the connection line between the chip under test and the driver circuit and comparator circuit in the test head via a relay or a resistor or capacitor connected in parallel. A test head for a test device, characterized in that it is connected to a test head.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1876685U JPS61136541U (en) | 1985-02-13 | 1985-02-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1876685U JPS61136541U (en) | 1985-02-13 | 1985-02-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61136541U true JPS61136541U (en) | 1986-08-25 |
Family
ID=30507708
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1876685U Pending JPS61136541U (en) | 1985-02-13 | 1985-02-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61136541U (en) |
-
1985
- 1985-02-13 JP JP1876685U patent/JPS61136541U/ja active Pending
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