JPS62170474A - レ−ザ蒸着装置 - Google Patents

レ−ザ蒸着装置

Info

Publication number
JPS62170474A
JPS62170474A JP61011064A JP1106486A JPS62170474A JP S62170474 A JPS62170474 A JP S62170474A JP 61011064 A JP61011064 A JP 61011064A JP 1106486 A JP1106486 A JP 1106486A JP S62170474 A JPS62170474 A JP S62170474A
Authority
JP
Japan
Prior art keywords
substrate
coating layer
irradiated
ion source
laser
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP61011064A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0480113B2 (enExample
Inventor
Yukishige Mineta
峰田　進栄
Nobuo Yasunaga
安永　暢男
Akira Obara
明 小原
Masayuki Ikeda
正幸 池田
Junichi Sato
純一 佐藤
Kunio Shibuki
渋木　邦夫
Mamoru Kobata
護 木幡
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology
Tungaloy Corp
Resonac Holdings Corp
Original Assignee
Agency of Industrial Science and Technology
Showa Denko KK
Toshiba Tungaloy Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology, Showa Denko KK, Toshiba Tungaloy Co Ltd filed Critical Agency of Industrial Science and Technology
Priority to JP61011064A priority Critical patent/JPS62170474A/ja
Publication of JPS62170474A publication Critical patent/JPS62170474A/ja
Publication of JPH0480113B2 publication Critical patent/JPH0480113B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
JP61011064A 1986-01-23 1986-01-23 レ−ザ蒸着装置 Granted JPS62170474A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61011064A JPS62170474A (ja) 1986-01-23 1986-01-23 レ−ザ蒸着装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61011064A JPS62170474A (ja) 1986-01-23 1986-01-23 レ−ザ蒸着装置

Publications (2)

Publication Number Publication Date
JPS62170474A true JPS62170474A (ja) 1987-07-27
JPH0480113B2 JPH0480113B2 (enExample) 1992-12-17

Family

ID=11767564

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61011064A Granted JPS62170474A (ja) 1986-01-23 1986-01-23 レ−ザ蒸着装置

Country Status (1)

Country Link
JP (1) JPS62170474A (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62254450A (ja) * 1986-04-28 1987-11-06 Nissin Electric Co Ltd 絶縁基体とその製造方法
JP2007090483A (ja) * 2005-09-28 2007-04-12 Sumitomo Metal Ind Ltd 切削工具及びその製造方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5920465A (ja) * 1982-07-24 1984-02-02 Adamando Kogyo Kk 超硬質工具及びその製造方法
JPS59116373A (ja) * 1982-12-22 1984-07-05 Agency Of Ind Science & Technol レ−ザ蒸着装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5920465A (ja) * 1982-07-24 1984-02-02 Adamando Kogyo Kk 超硬質工具及びその製造方法
JPS59116373A (ja) * 1982-12-22 1984-07-05 Agency Of Ind Science & Technol レ−ザ蒸着装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62254450A (ja) * 1986-04-28 1987-11-06 Nissin Electric Co Ltd 絶縁基体とその製造方法
JP2007090483A (ja) * 2005-09-28 2007-04-12 Sumitomo Metal Ind Ltd 切削工具及びその製造方法

Also Published As

Publication number Publication date
JPH0480113B2 (enExample) 1992-12-17

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term