JPS62169433A - 半導体装置の製造方法 - Google Patents
半導体装置の製造方法Info
- Publication number
- JPS62169433A JPS62169433A JP61011770A JP1177086A JPS62169433A JP S62169433 A JPS62169433 A JP S62169433A JP 61011770 A JP61011770 A JP 61011770A JP 1177086 A JP1177086 A JP 1177086A JP S62169433 A JPS62169433 A JP S62169433A
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- semiconductor chip
- electrode
- electrode connection
- adhesive
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 title claims abstract description 40
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 9
- 239000000758 substrate Substances 0.000 claims abstract description 26
- 239000000853 adhesive Substances 0.000 claims abstract description 16
- 230000001070 adhesive effect Effects 0.000 claims abstract description 16
- 238000000034 method Methods 0.000 claims description 17
- 229920001187 thermosetting polymer Polymers 0.000 claims description 6
- 238000010438 heat treatment Methods 0.000 claims description 4
- 238000003825 pressing Methods 0.000 claims description 3
- 239000007795 chemical reaction product Substances 0.000 abstract description 2
- 239000002904 solvent Substances 0.000 abstract description 2
- 229910052751 metal Inorganic materials 0.000 description 7
- 239000002184 metal Substances 0.000 description 7
- 229920005989 resin Polymers 0.000 description 6
- 239000011347 resin Substances 0.000 description 6
- 239000011651 chromium Substances 0.000 description 5
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 4
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 3
- 229910052782 aluminium Inorganic materials 0.000 description 3
- 229910052804 chromium Inorganic materials 0.000 description 3
- 238000007789 sealing Methods 0.000 description 3
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 229920006332 epoxy adhesive Polymers 0.000 description 2
- 230000004927 fusion Effects 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- WPPDFTBPZNZZRP-UHFFFAOYSA-N aluminum copper Chemical compound [Al].[Cu] WPPDFTBPZNZZRP-UHFFFAOYSA-N 0.000 description 1
- -1 aluminum-copper-silicon Chemical compound 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 230000002542 deteriorative effect Effects 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- 238000004806 packaging method and process Methods 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 239000009719 polyimide resin Substances 0.000 description 1
- 229920001296 polysiloxane Polymers 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 229920002050 silicone resin Polymers 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/15—Structure, shape, material or disposition of the bump connectors after the connecting process
- H01L2224/16—Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
- H01L2224/161—Disposition
- H01L2224/16151—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/16221—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/16225—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/73—Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
- H01L2224/732—Location after the connecting process
- H01L2224/73201—Location after the connecting process on the same surface
- H01L2224/73203—Bump and layer connectors
- H01L2224/73204—Bump and layer connectors the bump connector being embedded into the layer connector
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L2224/83—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
- H01L2224/8319—Arrangement of the layer connectors prior to mounting
- H01L2224/83192—Arrangement of the layer connectors prior to mounting wherein the layer connectors are disposed only on another item or body to be connected to the semiconductor or solid-state body
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/181—Encapsulation
Landscapes
- Wire Bonding (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP61011770A JPS62169433A (ja) | 1986-01-22 | 1986-01-22 | 半導体装置の製造方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP61011770A JPS62169433A (ja) | 1986-01-22 | 1986-01-22 | 半導体装置の製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS62169433A true JPS62169433A (ja) | 1987-07-25 |
JPH0551179B2 JPH0551179B2 (enrdf_load_stackoverflow) | 1993-07-30 |
Family
ID=11787208
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP61011770A Granted JPS62169433A (ja) | 1986-01-22 | 1986-01-22 | 半導体装置の製造方法 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS62169433A (enrdf_load_stackoverflow) |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH08236578A (ja) * | 1995-03-01 | 1996-09-13 | Nec Corp | 半導体素子のフリップチップ実装方法およびこの実装方 法に用いられる接着剤 |
WO1997022994A1 (en) * | 1995-12-15 | 1997-06-26 | Matsushita Electric Industrial Co., Ltd. | Method and device for electronic parts mounting and dispenser used therefor |
JP2000299553A (ja) * | 1999-04-13 | 2000-10-24 | Ricoh Microelectronics Co Ltd | 電子回路基板製造方法 |
JP2002538626A (ja) * | 1999-03-03 | 2002-11-12 | インテル・コーポレーション | 2つの異なるアンダーフィル材料を有する制御崩壊チップ接続(c4)集積回路パッケージ |
US6482676B2 (en) | 1997-01-09 | 2002-11-19 | Fujitsu Limited | Method of mounting semiconductor chip part on substrate |
CN112968109A (zh) * | 2020-11-27 | 2021-06-15 | 重庆康佳光电技术研究院有限公司 | 一种驱动背板及其制作方法 |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0720958U (ja) * | 1993-09-29 | 1995-04-18 | 陽 石川 | 開閉式遮蔽シート |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS56167340A (en) * | 1980-05-27 | 1981-12-23 | Toshiba Corp | Junction of semicondctor pellet with substrate |
JPS60262430A (ja) * | 1984-06-08 | 1985-12-25 | Matsushita Electric Ind Co Ltd | 半導体装置の製造方法 |
JPS62132331A (ja) * | 1985-12-05 | 1987-06-15 | Matsushita Electric Ind Co Ltd | 半導体装置の製造方法 |
-
1986
- 1986-01-22 JP JP61011770A patent/JPS62169433A/ja active Granted
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS56167340A (en) * | 1980-05-27 | 1981-12-23 | Toshiba Corp | Junction of semicondctor pellet with substrate |
JPS60262430A (ja) * | 1984-06-08 | 1985-12-25 | Matsushita Electric Ind Co Ltd | 半導体装置の製造方法 |
JPS62132331A (ja) * | 1985-12-05 | 1987-06-15 | Matsushita Electric Ind Co Ltd | 半導体装置の製造方法 |
Cited By (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH08236578A (ja) * | 1995-03-01 | 1996-09-13 | Nec Corp | 半導体素子のフリップチップ実装方法およびこの実装方 法に用いられる接着剤 |
WO1997022994A1 (en) * | 1995-12-15 | 1997-06-26 | Matsushita Electric Industrial Co., Ltd. | Method and device for electronic parts mounting and dispenser used therefor |
US6206066B1 (en) | 1995-12-15 | 2001-03-27 | Matsushita Electric Industrial Co., Ltd. | Apparatus for mounting an electronic component |
KR100317154B1 (ko) * | 1995-12-15 | 2002-02-28 | 모리시타 요이찌 | 전자부품의조립방법과이에사용되는장치및디스펜서 |
US6527905B1 (en) | 1995-12-15 | 2003-03-04 | Matsushita Electric Industrial Co., Ltd. | Method for mounting electronic components and apparatus and dispenser used in the method |
US6482676B2 (en) | 1997-01-09 | 2002-11-19 | Fujitsu Limited | Method of mounting semiconductor chip part on substrate |
JP2002538626A (ja) * | 1999-03-03 | 2002-11-12 | インテル・コーポレーション | 2つの異なるアンダーフィル材料を有する制御崩壊チップ接続(c4)集積回路パッケージ |
JP2000299553A (ja) * | 1999-04-13 | 2000-10-24 | Ricoh Microelectronics Co Ltd | 電子回路基板製造方法 |
CN112968109A (zh) * | 2020-11-27 | 2021-06-15 | 重庆康佳光电技术研究院有限公司 | 一种驱动背板及其制作方法 |
Also Published As
Publication number | Publication date |
---|---|
JPH0551179B2 (enrdf_load_stackoverflow) | 1993-07-30 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
LAPS | Cancellation because of no payment of annual fees |