JPS62168089A - 移動案内装置 - Google Patents

移動案内装置

Info

Publication number
JPS62168089A
JPS62168089A JP61008925A JP892586A JPS62168089A JP S62168089 A JPS62168089 A JP S62168089A JP 61008925 A JP61008925 A JP 61008925A JP 892586 A JP892586 A JP 892586A JP S62168089 A JPS62168089 A JP S62168089A
Authority
JP
Japan
Prior art keywords
bearing
guide
sliding
unit
movement
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP61008925A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0471475B2 (enrdf_load_stackoverflow
Inventor
崎野　茂夫
真人 根岸
松下　光一
堀越　康夫
肥後村　誠
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP61008925A priority Critical patent/JPS62168089A/ja
Priority to US07/003,769 priority patent/US4744675A/en
Publication of JPS62168089A publication Critical patent/JPS62168089A/ja
Publication of JPH0471475B2 publication Critical patent/JPH0471475B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Details Of Measuring And Other Instruments (AREA)
JP61008925A 1986-01-21 1986-01-21 移動案内装置 Granted JPS62168089A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP61008925A JPS62168089A (ja) 1986-01-21 1986-01-21 移動案内装置
US07/003,769 US4744675A (en) 1986-01-21 1987-01-16 Moving mechanism

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61008925A JPS62168089A (ja) 1986-01-21 1986-01-21 移動案内装置

Publications (2)

Publication Number Publication Date
JPS62168089A true JPS62168089A (ja) 1987-07-24
JPH0471475B2 JPH0471475B2 (enrdf_load_stackoverflow) 1992-11-13

Family

ID=11706231

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61008925A Granted JPS62168089A (ja) 1986-01-21 1986-01-21 移動案内装置

Country Status (1)

Country Link
JP (1) JPS62168089A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04122013A (ja) * 1990-09-13 1992-04-22 Canon Inc 露光装置
JP2015020220A (ja) * 2013-07-16 2015-02-02 日立金属株式会社 ステージ装置

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AU4167799A (en) * 1999-06-18 2001-01-09 Nikon Corporation Stage device and exposure system
JP6171318B2 (ja) * 2012-12-04 2017-08-02 株式会社ジェイテクト 静圧流体案内装置および静圧流体案内装置を用いた工作機械

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04122013A (ja) * 1990-09-13 1992-04-22 Canon Inc 露光装置
JP2015020220A (ja) * 2013-07-16 2015-02-02 日立金属株式会社 ステージ装置

Also Published As

Publication number Publication date
JPH0471475B2 (enrdf_load_stackoverflow) 1992-11-13

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term