JPH0471475B2 - - Google Patents
Info
- Publication number
- JPH0471475B2 JPH0471475B2 JP61008925A JP892586A JPH0471475B2 JP H0471475 B2 JPH0471475 B2 JP H0471475B2 JP 61008925 A JP61008925 A JP 61008925A JP 892586 A JP892586 A JP 892586A JP H0471475 B2 JPH0471475 B2 JP H0471475B2
- Authority
- JP
- Japan
- Prior art keywords
- bearing
- guide
- sliding
- unit
- movement
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 230000033001 locomotion Effects 0.000 claims description 18
- 230000002706 hydrostatic effect Effects 0.000 claims description 17
- 239000000919 ceramic Substances 0.000 claims description 13
- 230000003068 static effect Effects 0.000 claims description 9
- 238000006073 displacement reaction Methods 0.000 claims description 3
- 238000003825 pressing Methods 0.000 description 9
- 235000012431 wafers Nutrition 0.000 description 7
- 239000000428 dust Substances 0.000 description 6
- 238000010586 diagram Methods 0.000 description 4
- 230000005484 gravity Effects 0.000 description 4
- 230000036316 preload Effects 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 4
- 230000006866 deterioration Effects 0.000 description 3
- 238000013016 damping Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000005096 rolling process Methods 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 230000002250 progressing effect Effects 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
Landscapes
- Details Of Measuring And Other Instruments (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61008925A JPS62168089A (ja) | 1986-01-21 | 1986-01-21 | 移動案内装置 |
| US07/003,769 US4744675A (en) | 1986-01-21 | 1987-01-16 | Moving mechanism |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61008925A JPS62168089A (ja) | 1986-01-21 | 1986-01-21 | 移動案内装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62168089A JPS62168089A (ja) | 1987-07-24 |
| JPH0471475B2 true JPH0471475B2 (enrdf_load_stackoverflow) | 1992-11-13 |
Family
ID=11706231
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP61008925A Granted JPS62168089A (ja) | 1986-01-21 | 1986-01-21 | 移動案内装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62168089A (enrdf_load_stackoverflow) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2000079574A1 (fr) * | 1999-06-18 | 2000-12-28 | Nikon Corporation | Dispositif a etage et systeme d'exposition |
| CN103846751A (zh) * | 2012-12-04 | 2014-06-11 | 株式会社捷太格特 | 静压流体引导装置以及使用了静压流体引导装置的机床 |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04122013A (ja) * | 1990-09-13 | 1992-04-22 | Canon Inc | 露光装置 |
| JP6183021B2 (ja) * | 2013-07-16 | 2017-08-23 | 日立金属株式会社 | ステージ装置 |
-
1986
- 1986-01-21 JP JP61008925A patent/JPS62168089A/ja active Granted
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2000079574A1 (fr) * | 1999-06-18 | 2000-12-28 | Nikon Corporation | Dispositif a etage et systeme d'exposition |
| CN103846751A (zh) * | 2012-12-04 | 2014-06-11 | 株式会社捷太格特 | 静压流体引导装置以及使用了静压流体引导装置的机床 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62168089A (ja) | 1987-07-24 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |