AU4167799A - Stage device and exposure system - Google Patents

Stage device and exposure system

Info

Publication number
AU4167799A
AU4167799A AU41677/99A AU4167799A AU4167799A AU 4167799 A AU4167799 A AU 4167799A AU 41677/99 A AU41677/99 A AU 41677/99A AU 4167799 A AU4167799 A AU 4167799A AU 4167799 A AU4167799 A AU 4167799A
Authority
AU
Australia
Prior art keywords
exposure system
stage device
stage
exposure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU41677/99A
Inventor
Hiroaki Narushima
Kazuya Ono
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Original Assignee
Nikon Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nikon Corp filed Critical Nikon Corp
Publication of AU4167799A publication Critical patent/AU4167799A/en
Abandoned legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691—Handling of masks or workpieces
    • G03F7/70716—Stages
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/01—Frames, beds, pillars or like members; Arrangement of ways
    • B23Q1/015—Frames, beds, pillars
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/25—Movable or adjustable work or tool supports
    • B23Q1/26—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
AU41677/99A 1999-06-18 1999-06-18 Stage device and exposure system Abandoned AU4167799A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP1999/003253 WO2000079574A1 (en) 1999-06-18 1999-06-18 Stage device and exposure system

Publications (1)

Publication Number Publication Date
AU4167799A true AU4167799A (en) 2001-01-09

Family

ID=14235994

Family Applications (1)

Application Number Title Priority Date Filing Date
AU41677/99A Abandoned AU4167799A (en) 1999-06-18 1999-06-18 Stage device and exposure system

Country Status (2)

Country Link
AU (1) AU4167799A (en)
WO (1) WO2000079574A1 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5132491B2 (en) * 2007-10-17 2013-01-30 キヤノン株式会社 Drive apparatus, exposure apparatus, and device manufacturing method
JP2009210295A (en) * 2008-02-29 2009-09-17 Canon Inc Positioning equipment, exposure system and device manufacturing method
JP6960653B2 (en) * 2017-03-30 2021-11-05 ピー・ヂー・ダブリュー株式会社 Slider device and its manufacturing method

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59129633A (en) * 1983-01-08 1984-07-26 Canon Inc X-y stage
JPS62168089A (en) * 1986-01-21 1987-07-24 キヤノン株式会社 Movement guide apparatus
JPS62172577U (en) * 1986-04-18 1987-11-02
JPH023381U (en) * 1988-06-09 1990-01-10
JPH08229759A (en) * 1995-02-24 1996-09-10 Canon Inc Positioning device, and device and method of manufacturing device

Also Published As

Publication number Publication date
WO2000079574A1 (en) 2000-12-28

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Legal Events

Date Code Title Description
MK6 Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase