JPS62153765A - 積層型圧電セラミツク素子 - Google Patents
積層型圧電セラミツク素子Info
- Publication number
- JPS62153765A JPS62153765A JP60294863A JP29486385A JPS62153765A JP S62153765 A JPS62153765 A JP S62153765A JP 60294863 A JP60294863 A JP 60294863A JP 29486385 A JP29486385 A JP 29486385A JP S62153765 A JPS62153765 A JP S62153765A
- Authority
- JP
- Japan
- Prior art keywords
- piezoelectric ceramic
- layers
- layer
- electrodes
- insulating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000919 ceramic Substances 0.000 title claims abstract description 60
- 239000011810 insulating material Substances 0.000 claims abstract description 4
- 238000003475 lamination Methods 0.000 claims description 4
- 230000001681 protective effect Effects 0.000 abstract description 3
- 238000010030 laminating Methods 0.000 abstract description 2
- 239000010410 layer Substances 0.000 description 30
- 230000010287 polarization Effects 0.000 description 29
- 230000001133 acceleration Effects 0.000 description 13
- 238000000034 method Methods 0.000 description 9
- 238000010586 diagram Methods 0.000 description 6
- 230000035945 sensitivity Effects 0.000 description 5
- 239000000853 adhesive Substances 0.000 description 4
- 230000001070 adhesive effect Effects 0.000 description 4
- 238000009413 insulation Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 230000005684 electric field Effects 0.000 description 3
- 150000003839 salts Chemical class 0.000 description 3
- 239000002356 single layer Substances 0.000 description 3
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
Landscapes
- Transducers For Ultrasonic Waves (AREA)
- Pressure Sensors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60294863A JPS62153765A (ja) | 1985-12-27 | 1985-12-27 | 積層型圧電セラミツク素子 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60294863A JPS62153765A (ja) | 1985-12-27 | 1985-12-27 | 積層型圧電セラミツク素子 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62153765A true JPS62153765A (ja) | 1987-07-08 |
| JPH0246907B2 JPH0246907B2 (enExample) | 1990-10-17 |
Family
ID=17813228
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60294863A Granted JPS62153765A (ja) | 1985-12-27 | 1985-12-27 | 積層型圧電セラミツク素子 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62153765A (enExample) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2016080612A (ja) * | 2014-10-21 | 2016-05-16 | セイコーエプソン株式会社 | 力検出装置及びロボット |
| JP2017534895A (ja) * | 2014-09-02 | 2017-11-24 | エーエスエムエル ネザーランズ ビー．ブイ． | センサ、オブジェクト位置決めシステム、リソグラフィ装置、及びデバイス製造方法 |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2011001515A1 (ja) * | 2009-06-30 | 2011-01-06 | 富士通株式会社 | 加速度センサ、振動発電デバイス及び加速度センサの製造方法 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS53120478A (en) * | 1977-03-29 | 1978-10-20 | Kobayashi Rigaku Kenkiyuushiyo | Acceleration type oscillation pick up |
-
1985
- 1985-12-27 JP JP60294863A patent/JPS62153765A/ja active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS53120478A (en) * | 1977-03-29 | 1978-10-20 | Kobayashi Rigaku Kenkiyuushiyo | Acceleration type oscillation pick up |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2017534895A (ja) * | 2014-09-02 | 2017-11-24 | エーエスエムエル ネザーランズ ビー．ブイ． | センサ、オブジェクト位置決めシステム、リソグラフィ装置、及びデバイス製造方法 |
| US10061213B2 (en) | 2014-09-02 | 2018-08-28 | Asml Netherlands B.V. | Sensor, object positioning system, lithographic apparatus and device manufacturing method |
| JP2016080612A (ja) * | 2014-10-21 | 2016-05-16 | セイコーエプソン株式会社 | 力検出装置及びロボット |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0246907B2 (enExample) | 1990-10-17 |
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