JPS62152433U - - Google Patents

Info

Publication number
JPS62152433U
JPS62152433U JP4018586U JP4018586U JPS62152433U JP S62152433 U JPS62152433 U JP S62152433U JP 4018586 U JP4018586 U JP 4018586U JP 4018586 U JP4018586 U JP 4018586U JP S62152433 U JPS62152433 U JP S62152433U
Authority
JP
Japan
Prior art keywords
exposure
unevenness
detection means
exposure apparatus
detecting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4018586U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4018586U priority Critical patent/JPS62152433U/ja
Publication of JPS62152433U publication Critical patent/JPS62152433U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Projection-Type Copiers In General (AREA)
JP4018586U 1986-03-19 1986-03-19 Pending JPS62152433U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4018586U JPS62152433U (enrdf_load_stackoverflow) 1986-03-19 1986-03-19

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4018586U JPS62152433U (enrdf_load_stackoverflow) 1986-03-19 1986-03-19

Publications (1)

Publication Number Publication Date
JPS62152433U true JPS62152433U (enrdf_load_stackoverflow) 1987-09-28

Family

ID=30854044

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4018586U Pending JPS62152433U (enrdf_load_stackoverflow) 1986-03-19 1986-03-19

Country Status (1)

Country Link
JP (1) JPS62152433U (enrdf_load_stackoverflow)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5425863A (en) * 1977-07-29 1979-02-27 Koden Electronics Co Ltd Detector with color indication
JPS57117238A (en) * 1981-01-14 1982-07-21 Nippon Kogaku Kk <Nikon> Exposing and baking device for manufacturing integrated circuit with illuminometer
JPS57141923A (en) * 1981-02-27 1982-09-02 Hitachi Ltd Projection type exposure device
JPS60168026A (ja) * 1984-02-13 1985-08-31 Canon Inc 投影露光装置

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5425863A (en) * 1977-07-29 1979-02-27 Koden Electronics Co Ltd Detector with color indication
JPS57117238A (en) * 1981-01-14 1982-07-21 Nippon Kogaku Kk <Nikon> Exposing and baking device for manufacturing integrated circuit with illuminometer
JPS57141923A (en) * 1981-02-27 1982-09-02 Hitachi Ltd Projection type exposure device
JPS60168026A (ja) * 1984-02-13 1985-08-31 Canon Inc 投影露光装置

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