JPS6214825B2 - - Google Patents
Info
- Publication number
- JPS6214825B2 JPS6214825B2 JP17934780A JP17934780A JPS6214825B2 JP S6214825 B2 JPS6214825 B2 JP S6214825B2 JP 17934780 A JP17934780 A JP 17934780A JP 17934780 A JP17934780 A JP 17934780A JP S6214825 B2 JPS6214825 B2 JP S6214825B2
- Authority
- JP
- Japan
- Prior art keywords
- shutter
- exposure
- closing operation
- amount
- wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000001514 detection method Methods 0.000 claims description 5
- 230000001678 irradiating effect Effects 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 8
- 230000006866 deterioration Effects 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 102100028908 Cullin-3 Human genes 0.000 description 1
- 101000916238 Homo sapiens Cullin-3 Proteins 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 1
- 229910052753 mercury Inorganic materials 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70483—Information management; Active and passive control; Testing; Wafer monitoring, e.g. pattern monitoring
- G03F7/7055—Exposure light control in all parts of the microlithographic apparatus, e.g. pulse length control or light interruption
- G03F7/70558—Dose control, i.e. achievement of a desired dose
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/20—Exposure; Apparatus therefor
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Preparing Plates And Mask In Photomechanical Process (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17934780A JPS57101839A (en) | 1980-12-18 | 1980-12-18 | Exposure device for wafer or photomask |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17934780A JPS57101839A (en) | 1980-12-18 | 1980-12-18 | Exposure device for wafer or photomask |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS57101839A JPS57101839A (en) | 1982-06-24 |
JPS6214825B2 true JPS6214825B2 (ko) | 1987-04-03 |
Family
ID=16064247
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP17934780A Granted JPS57101839A (en) | 1980-12-18 | 1980-12-18 | Exposure device for wafer or photomask |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS57101839A (ko) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5858730A (ja) * | 1981-10-05 | 1983-04-07 | Hitachi Ltd | 投影露光装置 |
JPS6070452A (ja) * | 1983-09-28 | 1985-04-22 | Nippon Kogaku Kk <Nikon> | 露光装置 |
JPH0715875B2 (ja) * | 1984-12-27 | 1995-02-22 | キヤノン株式会社 | 露光装置及び方法 |
JPS60198726A (ja) * | 1984-03-23 | 1985-10-08 | Hitachi Ltd | X線露光装置の露光量調整方法と装置 |
JPS61278140A (ja) * | 1985-05-31 | 1986-12-09 | Fuji Photo Optical Co Ltd | 回折格子露光装置における露光時間設定方法 |
JP2571054B2 (ja) * | 1987-04-28 | 1997-01-16 | キヤノン株式会社 | 露光装置及び素子製造方法 |
DE68929187T2 (de) | 1988-09-02 | 2000-09-28 | Canon Kk | Belichtungsapparat |
-
1980
- 1980-12-18 JP JP17934780A patent/JPS57101839A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS57101839A (en) | 1982-06-24 |
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