JPS62141792U - - Google Patents

Info

Publication number
JPS62141792U
JPS62141792U JP2891986U JP2891986U JPS62141792U JP S62141792 U JPS62141792 U JP S62141792U JP 2891986 U JP2891986 U JP 2891986U JP 2891986 U JP2891986 U JP 2891986U JP S62141792 U JPS62141792 U JP S62141792U
Authority
JP
Japan
Prior art keywords
movable
slope
inclined guide
table device
base
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2891986U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0338714Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2891986U priority Critical patent/JPH0338714Y2/ja
Priority to NL8700445A priority patent/NL8700445A/nl
Priority to US07/019,223 priority patent/US4739545A/en
Priority to DE19873706327 priority patent/DE3706327C2/de
Priority to GB8704829A priority patent/GB2188263B/en
Publication of JPS62141792U publication Critical patent/JPS62141792U/ja
Application granted granted Critical
Publication of JPH0338714Y2 publication Critical patent/JPH0338714Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Control Of Position Or Direction (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Details Of Measuring And Other Instruments (AREA)
JP2891986U 1986-02-28 1986-02-28 Expired JPH0338714Y2 (enrdf_load_stackoverflow)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2891986U JPH0338714Y2 (enrdf_load_stackoverflow) 1986-02-28 1986-02-28
NL8700445A NL8700445A (nl) 1986-02-28 1987-02-23 Positioneertafel voor een samengestelde beweging.
US07/019,223 US4739545A (en) 1986-02-28 1987-02-26 Composite movement table apparatus
DE19873706327 DE3706327C2 (de) 1986-02-28 1987-02-27 Bewegliche Verbundtischanordnung für die fotolithografische Herstellung
GB8704829A GB2188263B (en) 1986-02-28 1987-03-02 Composite movement table apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2891986U JPH0338714Y2 (enrdf_load_stackoverflow) 1986-02-28 1986-02-28

Publications (2)

Publication Number Publication Date
JPS62141792U true JPS62141792U (enrdf_load_stackoverflow) 1987-09-07
JPH0338714Y2 JPH0338714Y2 (enrdf_load_stackoverflow) 1991-08-15

Family

ID=30832330

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2891986U Expired JPH0338714Y2 (enrdf_load_stackoverflow) 1986-02-28 1986-02-28

Country Status (1)

Country Link
JP (1) JPH0338714Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0338714Y2 (enrdf_load_stackoverflow) 1991-08-15

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