JPH0338714Y2 - - Google Patents
Info
- Publication number
- JPH0338714Y2 JPH0338714Y2 JP2891986U JP2891986U JPH0338714Y2 JP H0338714 Y2 JPH0338714 Y2 JP H0338714Y2 JP 2891986 U JP2891986 U JP 2891986U JP 2891986 U JP2891986 U JP 2891986U JP H0338714 Y2 JPH0338714 Y2 JP H0338714Y2
- Authority
- JP
- Japan
- Prior art keywords
- slider
- moving
- chuck
- slope
- movable
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000005096 rolling process Methods 0.000 claims description 17
- 230000007246 mechanism Effects 0.000 claims description 14
- 230000005284 excitation Effects 0.000 claims description 11
- 150000001875 compounds Chemical class 0.000 claims description 4
- 239000002131 composite material Substances 0.000 claims description 3
- 238000000034 method Methods 0.000 description 10
- 238000001514 detection method Methods 0.000 description 8
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical group [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 6
- 229910052753 mercury Inorganic materials 0.000 description 6
- 238000006073 displacement reaction Methods 0.000 description 5
- 238000013016 damping Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 239000003638 chemical reducing agent Substances 0.000 description 3
- 239000004519 grease Substances 0.000 description 2
- 229920001296 polysiloxane Polymers 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 238000007664 blowing Methods 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 230000005389 magnetism Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000007935 neutral effect Effects 0.000 description 1
- 238000003909 pattern recognition Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 230000036316 preload Effects 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
Landscapes
- Length Measuring Devices With Unspecified Measuring Means (AREA)
- Details Of Measuring And Other Instruments (AREA)
- Control Of Position Or Direction (AREA)
Priority Applications (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2891986U JPH0338714Y2 (enrdf_load_stackoverflow) | 1986-02-28 | 1986-02-28 | |
| NL8700445A NL8700445A (nl) | 1986-02-28 | 1987-02-23 | Positioneertafel voor een samengestelde beweging. |
| US07/019,223 US4739545A (en) | 1986-02-28 | 1987-02-26 | Composite movement table apparatus |
| DE19873706327 DE3706327C2 (de) | 1986-02-28 | 1987-02-27 | Bewegliche Verbundtischanordnung für die fotolithografische Herstellung |
| GB8704829A GB2188263B (en) | 1986-02-28 | 1987-03-02 | Composite movement table apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2891986U JPH0338714Y2 (enrdf_load_stackoverflow) | 1986-02-28 | 1986-02-28 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62141792U JPS62141792U (enrdf_load_stackoverflow) | 1987-09-07 |
| JPH0338714Y2 true JPH0338714Y2 (enrdf_load_stackoverflow) | 1991-08-15 |
Family
ID=30832330
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2891986U Expired JPH0338714Y2 (enrdf_load_stackoverflow) | 1986-02-28 | 1986-02-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0338714Y2 (enrdf_load_stackoverflow) |
-
1986
- 1986-02-28 JP JP2891986U patent/JPH0338714Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62141792U (enrdf_load_stackoverflow) | 1987-09-07 |
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