JPH0543469Y2 - - Google Patents
Info
- Publication number
- JPH0543469Y2 JPH0543469Y2 JP14958387U JP14958387U JPH0543469Y2 JP H0543469 Y2 JPH0543469 Y2 JP H0543469Y2 JP 14958387 U JP14958387 U JP 14958387U JP 14958387 U JP14958387 U JP 14958387U JP H0543469 Y2 JPH0543469 Y2 JP H0543469Y2
- Authority
- JP
- Japan
- Prior art keywords
- suction
- exposed
- mounting table
- chuck
- mounting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 230000009467 reduction Effects 0.000 description 15
- 235000012431 wafers Nutrition 0.000 description 13
- 230000007246 mechanism Effects 0.000 description 10
- 238000004891 communication Methods 0.000 description 9
- 238000013016 damping Methods 0.000 description 9
- 238000005096 rolling process Methods 0.000 description 9
- 238000001514 detection method Methods 0.000 description 5
- 230000002093 peripheral effect Effects 0.000 description 5
- 230000000694 effects Effects 0.000 description 4
- 125000006850 spacer group Chemical group 0.000 description 4
- 238000006073 displacement reaction Methods 0.000 description 3
- 230000005284 excitation Effects 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 238000005192 partition Methods 0.000 description 3
- 230000008878 coupling Effects 0.000 description 2
- 238000010168 coupling process Methods 0.000 description 2
- 238000005859 coupling reaction Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- 238000007664 blowing Methods 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 230000008602 contraction Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 229920002545 silicone oil Polymers 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Details Of Measuring And Other Instruments (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14958387U JPH0543469Y2 (enrdf_load_stackoverflow) | 1987-09-30 | 1987-09-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14958387U JPH0543469Y2 (enrdf_load_stackoverflow) | 1987-09-30 | 1987-09-30 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6454335U JPS6454335U (enrdf_load_stackoverflow) | 1989-04-04 |
| JPH0543469Y2 true JPH0543469Y2 (enrdf_load_stackoverflow) | 1993-11-02 |
Family
ID=31421943
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14958387U Expired - Lifetime JPH0543469Y2 (enrdf_load_stackoverflow) | 1987-09-30 | 1987-09-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0543469Y2 (enrdf_load_stackoverflow) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5289898B2 (ja) * | 2008-11-07 | 2013-09-11 | 住友重機械工業株式会社 | ステージ装置及びプローバ装置 |
-
1987
- 1987-09-30 JP JP14958387U patent/JPH0543469Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6454335U (enrdf_load_stackoverflow) | 1989-04-04 |