JPH0519948Y2 - - Google Patents
Info
- Publication number
- JPH0519948Y2 JPH0519948Y2 JP7715688U JP7715688U JPH0519948Y2 JP H0519948 Y2 JPH0519948 Y2 JP H0519948Y2 JP 7715688 U JP7715688 U JP 7715688U JP 7715688 U JP7715688 U JP 7715688U JP H0519948 Y2 JPH0519948 Y2 JP H0519948Y2
- Authority
- JP
- Japan
- Prior art keywords
- chuck
- exposed
- wafer
- holding member
- suction
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 230000008878 coupling Effects 0.000 claims description 9
- 238000010168 coupling process Methods 0.000 claims description 9
- 238000005859 coupling reaction Methods 0.000 claims description 9
- 238000001179 sorption measurement Methods 0.000 claims description 6
- 235000012431 wafers Nutrition 0.000 description 61
- 230000007246 mechanism Effects 0.000 description 10
- 230000005284 excitation Effects 0.000 description 7
- 230000001105 regulatory effect Effects 0.000 description 7
- 230000000694 effects Effects 0.000 description 4
- 238000001514 detection method Methods 0.000 description 3
- 238000013016 damping Methods 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 230000001276 controlling effect Effects 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 239000004519 grease Substances 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 238000005096 rolling process Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
Landscapes
- Details Of Measuring And Other Instruments (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7715688U JPH0519948Y2 (enrdf_load_stackoverflow) | 1988-06-10 | 1988-06-10 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7715688U JPH0519948Y2 (enrdf_load_stackoverflow) | 1988-06-10 | 1988-06-10 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH02717U JPH02717U (enrdf_load_stackoverflow) | 1990-01-05 |
| JPH0519948Y2 true JPH0519948Y2 (enrdf_load_stackoverflow) | 1993-05-25 |
Family
ID=31302151
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7715688U Expired - Lifetime JPH0519948Y2 (enrdf_load_stackoverflow) | 1988-06-10 | 1988-06-10 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0519948Y2 (enrdf_load_stackoverflow) |
-
1988
- 1988-06-10 JP JP7715688U patent/JPH0519948Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH02717U (enrdf_load_stackoverflow) | 1990-01-05 |
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