JPH0436476Y2 - - Google Patents
Info
- Publication number
- JPH0436476Y2 JPH0436476Y2 JP5816088U JP5816088U JPH0436476Y2 JP H0436476 Y2 JPH0436476 Y2 JP H0436476Y2 JP 5816088 U JP5816088 U JP 5816088U JP 5816088 U JP5816088 U JP 5816088U JP H0436476 Y2 JPH0436476 Y2 JP H0436476Y2
- Authority
- JP
- Japan
- Prior art keywords
- mounting table
- slider
- slope
- guide
- cooling water
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000005096 rolling process Methods 0.000 claims description 28
- 230000007246 mechanism Effects 0.000 claims description 26
- 150000001875 compounds Chemical class 0.000 claims description 12
- 238000013016 damping Methods 0.000 claims description 10
- 239000003507 refrigerant Substances 0.000 claims description 7
- 239000002131 composite material Substances 0.000 claims description 3
- 239000000498 cooling water Substances 0.000 description 40
- 230000009467 reduction Effects 0.000 description 12
- 235000012431 wafers Nutrition 0.000 description 8
- 238000001514 detection method Methods 0.000 description 7
- 238000005259 measurement Methods 0.000 description 7
- 230000000694 effects Effects 0.000 description 5
- 229910000838 Al alloy Inorganic materials 0.000 description 3
- 230000008859 change Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 230000005284 excitation Effects 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 125000006850 spacer group Chemical group 0.000 description 3
- 230000008878 coupling Effects 0.000 description 2
- 238000010168 coupling process Methods 0.000 description 2
- 238000005859 coupling reaction Methods 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 2
- 239000004973 liquid crystal related substance Substances 0.000 description 2
- 239000003921 oil Substances 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 238000007664 blowing Methods 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 239000003562 lightweight material Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 229920002545 silicone oil Polymers 0.000 description 1
Landscapes
- Details Of Measuring And Other Instruments (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5816088U JPH0436476Y2 (enrdf_load_stackoverflow) | 1987-08-28 | 1988-04-28 |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13109387 | 1987-08-28 | ||
| JP5816088U JPH0436476Y2 (enrdf_load_stackoverflow) | 1987-08-28 | 1988-04-28 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0197288U JPH0197288U (enrdf_load_stackoverflow) | 1989-06-28 |
| JPH0436476Y2 true JPH0436476Y2 (enrdf_load_stackoverflow) | 1992-08-27 |
Family
ID=31718189
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5816088U Expired JPH0436476Y2 (enrdf_load_stackoverflow) | 1987-08-28 | 1988-04-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0436476Y2 (enrdf_load_stackoverflow) |
-
1988
- 1988-04-28 JP JP5816088U patent/JPH0436476Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0197288U (enrdf_load_stackoverflow) | 1989-06-28 |
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