JPS62152293U - - Google Patents
Info
- Publication number
- JPS62152293U JPS62152293U JP4018686U JP4018686U JPS62152293U JP S62152293 U JPS62152293 U JP S62152293U JP 4018686 U JP4018686 U JP 4018686U JP 4018686 U JP4018686 U JP 4018686U JP S62152293 U JPS62152293 U JP S62152293U
- Authority
- JP
- Japan
- Prior art keywords
- damping
- movement table
- fine movement
- damping surface
- high viscosity
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Details Of Measuring And Other Instruments (AREA)
- Control Of Position Or Direction (AREA)
Priority Applications (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4018686U JPH0339751Y2 (enrdf_load_stackoverflow) | 1986-03-19 | 1986-03-19 | |
| NL8700445A NL8700445A (nl) | 1986-02-28 | 1987-02-23 | Positioneertafel voor een samengestelde beweging. |
| US07/019,223 US4739545A (en) | 1986-02-28 | 1987-02-26 | Composite movement table apparatus |
| DE19873706327 DE3706327C2 (de) | 1986-02-28 | 1987-02-27 | Bewegliche Verbundtischanordnung für die fotolithografische Herstellung |
| GB8704829A GB2188263B (en) | 1986-02-28 | 1987-03-02 | Composite movement table apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4018686U JPH0339751Y2 (enrdf_load_stackoverflow) | 1986-03-19 | 1986-03-19 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62152293U true JPS62152293U (enrdf_load_stackoverflow) | 1987-09-26 |
| JPH0339751Y2 JPH0339751Y2 (enrdf_load_stackoverflow) | 1991-08-21 |
Family
ID=30854046
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4018686U Expired JPH0339751Y2 (enrdf_load_stackoverflow) | 1986-02-28 | 1986-03-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0339751Y2 (enrdf_load_stackoverflow) |
-
1986
- 1986-03-19 JP JP4018686U patent/JPH0339751Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0339751Y2 (enrdf_load_stackoverflow) | 1991-08-21 |
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