DE3751515D1 - Positioniervorrichtung. - Google Patents

Positioniervorrichtung.

Info

Publication number
DE3751515D1
DE3751515D1 DE3751515T DE3751515T DE3751515D1 DE 3751515 D1 DE3751515 D1 DE 3751515D1 DE 3751515 T DE3751515 T DE 3751515T DE 3751515 T DE3751515 T DE 3751515T DE 3751515 D1 DE3751515 D1 DE 3751515D1
Authority
DE
Germany
Prior art keywords
support
positioning device
displaceable
supports
vertical direction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE3751515T
Other languages
English (en)
Other versions
DE3751515T2 (de
Inventor
Adrianus G Bouwer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Koninklijke Philips NV
Original Assignee
Philips Electronics NV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Electronics NV filed Critical Philips Electronics NV
Application granted granted Critical
Publication of DE3751515D1 publication Critical patent/DE3751515D1/de
Publication of DE3751515T2 publication Critical patent/DE3751515T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691—Handling of masks or workpieces
    • G03F7/70716—Stages
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/25—Movable or adjustable work or tool supports
    • B23Q1/26—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members
    • B23Q1/34—Relative movement obtained by use of deformable elements, e.g. piezoelectric, magnetostrictive, elastic or thermally-dilatable elements
    • B23Q1/36—Springs
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/25—Movable or adjustable work or tool supports
    • B23Q1/44—Movable or adjustable work or tool supports using particular mechanisms
    • B23Q1/56—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism
    • B23Q1/60—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism
    • B23Q1/62—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism with perpendicular axes, e.g. cross-slides
    • B23Q1/621—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism with perpendicular axes, e.g. cross-slides a single sliding pair followed perpendicularly by a single sliding pair
    • B23Q1/623—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism with perpendicular axes, e.g. cross-slides a single sliding pair followed perpendicularly by a single sliding pair followed perpendicularly by a single rotating pair

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Machine Tool Sensing Apparatuses (AREA)
  • Supply And Installment Of Electrical Components (AREA)
  • Control Of Position Or Direction (AREA)
  • Vehicle Body Suspensions (AREA)
  • Die Bonding (AREA)
  • Automatic Control Of Machine Tools (AREA)
  • Machine Tool Units (AREA)
DE3751515T 1986-04-29 1987-04-16 Positioniervorrichtung. Expired - Fee Related DE3751515T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL8601095A NL8601095A (nl) 1986-04-29 1986-04-29 Positioneerinrichting.

Publications (2)

Publication Number Publication Date
DE3751515D1 true DE3751515D1 (de) 1995-10-19
DE3751515T2 DE3751515T2 (de) 1996-04-25

Family

ID=19847951

Family Applications (1)

Application Number Title Priority Date Filing Date
DE3751515T Expired - Fee Related DE3751515T2 (de) 1986-04-29 1987-04-16 Positioniervorrichtung.

Country Status (6)

Country Link
US (1) US4698575A (de)
EP (1) EP0244012B1 (de)
JP (1) JPH083756B2 (de)
AT (1) ATE127940T1 (de)
DE (1) DE3751515T2 (de)
NL (1) NL8601095A (de)

Families Citing this family (41)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2620244B1 (fr) * 1987-09-08 1990-01-12 Micro Controle Systeme pour le positionnement rigoureux d'un objet le long d'un axe
US4952858A (en) * 1988-05-18 1990-08-28 Galburt Daniel N Microlithographic apparatus
JPH02149869A (ja) * 1988-11-30 1990-06-08 Sharp Corp 複写機の直線駆動装置
NL8902473A (nl) * 1989-10-05 1991-05-01 Philips Nv Lineaire motor, alsmede positioneerinrichting voorzien van ten minste een lineaire motor.
JP3087305B2 (ja) * 1990-03-05 2000-09-11 株式会社ニコン ステージ装置
NL9001012A (nl) * 1990-04-27 1991-11-18 Koninkl Philips Electronics Nv Positioneerinrichting met statische fluidumlagers.
US5140242A (en) * 1990-04-30 1992-08-18 International Business Machines Corporation Servo guided stage system
NL9001611A (nl) * 1990-07-16 1992-02-17 Asm Lithography Bv Apparaat voor het afbeelden van een maskerpatroon op een substraat.
US5157296A (en) * 1990-12-20 1992-10-20 Massachusetts Institute Of Technology Bearing for use in high resolution precision control device
NL9100421A (nl) * 1991-03-08 1992-10-01 Asm Lithography Bv Ondersteuningsinrichting met een kantelbare objecttafel alsmede optisch lithografische inrichting voorzien van een dergelijke ondersteuningsinrichting.
DE4113027A1 (de) * 1991-04-20 1992-10-22 Leitz Messtechnik Verfahren und vorrichtung zur fotolithographischen herstellung von langen gittermassstaeben
DE4123323C2 (de) * 1991-07-13 1994-02-10 Andreas Ehlerding Werkzeugträger
US5196745A (en) * 1991-08-16 1993-03-23 Massachusetts Institute Of Technology Magnetic positioning device
KR950003660A (ko) * 1992-08-12 1995-02-17 제이지에이롤프스 변속 기구, 변속 기구를 구비한 위치 설정 장치 및, 위치 설정 장치를 구비한 리도그래픽 장치
DE4322011C1 (de) * 1993-07-02 1994-09-08 Jenoptik Jena Gmbh Einrichtung zur Beseitigung von Verkippungen in Antrieben mit Gaslagern
JP3695542B2 (ja) * 1994-02-23 2005-09-14 日本トムソン株式会社 リニア電磁アクチュエータを具備したｘｙ駆動装置
US6989647B1 (en) * 1994-04-01 2006-01-24 Nikon Corporation Positioning device having dynamically isolated frame, and lithographic device provided with such a positioning device
US5874820A (en) * 1995-04-04 1999-02-23 Nikon Corporation Window frame-guided stage mechanism
US7365513B1 (en) 1994-04-01 2008-04-29 Nikon Corporation Positioning device having dynamically isolated frame, and lithographic device provided with such a positioning device
US5528118A (en) * 1994-04-01 1996-06-18 Nikon Precision, Inc. Guideless stage with isolated reaction stage
US6246204B1 (en) 1994-06-27 2001-06-12 Nikon Corporation Electromagnetic alignment and scanning apparatus
US5828142A (en) * 1994-10-03 1998-10-27 Mrs Technology, Inc. Platen for use with lithographic stages and method of making same
US5623853A (en) * 1994-10-19 1997-04-29 Nikon Precision Inc. Precision motion stage with single guide beam and follower stage
JPH08229759A (ja) * 1995-02-24 1996-09-10 Canon Inc 位置決め装置並びにデバイス製造装置及び方法
US6008500A (en) * 1995-04-04 1999-12-28 Nikon Corporation Exposure apparatus having dynamically isolated reaction frame
TW318255B (de) 1995-05-30 1997-10-21 Philips Electronics Nv
US5760564A (en) * 1995-06-27 1998-06-02 Nikon Precision Inc. Dual guide beam stage mechanism with yaw control
US5835198A (en) * 1997-01-06 1998-11-10 Etec Systems, Inc. Articulated platform mechanism for laser pattern generation on a workpiece
TWI242113B (en) * 1998-07-17 2005-10-21 Asml Netherlands Bv Positioning device and lithographic projection apparatus comprising such a device
EP0973067A3 (de) * 1998-07-17 2001-10-24 ASM Lithography B.V. Positionierungsvorrichtung und lithographisches Projektionsapparat mit einer solchen Vorrichtung
DE29907533U1 (de) * 1999-04-28 2000-09-21 Belyakov, Vladimir K., Balaschicha Gerät, insbesondere Arbeitstisch für einen Projektor
IT249658Y1 (it) * 2000-01-31 2003-05-28 Balance Systems Spa Dispositivo di supporto e guida per piccole macchine utensili in particolare per equilibratrici di masse rotanti
EP1148389B1 (de) * 2000-04-17 2008-02-27 ASML Netherlands B.V. Lithographischer Apparat und Verfahren zur Herstellung einer Vorrichtung
US6814096B2 (en) * 2000-12-15 2004-11-09 Nor-Cal Products, Inc. Pressure controller and method
US7434362B2 (en) 2001-07-20 2008-10-14 Unirac, Inc. System for removably and adjustably mounting a device on a surface
US6882126B2 (en) * 2001-11-29 2005-04-19 Nikon Corporation Holder mover for a stage assembly
US7600349B2 (en) 2003-02-26 2009-10-13 Unirac, Inc. Low profile mounting system
CA2629355A1 (en) * 2005-11-17 2007-06-07 Socovar, Societe En Commandite Planar parallel mechanism and method
NL2006714A (en) * 2010-06-07 2011-12-08 Asml Netherlands Bv Displacement device, lithographic apparatus and positioning method.
CN103066894B (zh) * 2012-12-12 2015-05-20 清华大学 一种六自由度磁悬浮工件台
PL3527323T3 (pl) * 2018-02-19 2022-07-25 General Electric Company Narzędzie do wyrównywania i sposób wyrównywania ciężkich maszyn i sprzętu

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3361018A (en) * 1965-10-08 1968-01-02 Elihu I. Druckman Spring mounted tool holder
NL7108235A (de) * 1971-06-16 1972-12-19
DE3070825D1 (en) * 1979-04-02 1985-08-08 Eaton Optimetrix Inc A system for positioning a utilization device
US4575942A (en) * 1982-10-18 1986-03-18 Hitachi, Ltd. Ultra-precision two-dimensional moving apparatus
NL8204450A (nl) * 1982-11-17 1984-06-18 Philips Nv Verplaatsingsinrichting, in het bijzonder voor het stralingslithografisch behandelen van een substraat.
US4525852A (en) * 1983-03-15 1985-06-25 Micronix Partners Alignment apparatus
US4506204A (en) * 1983-06-10 1985-03-19 The Perkin-Elmer Corporation Electro-magnetic apparatus
US4507597A (en) * 1983-06-10 1985-03-26 The Perkin-Elmer Corporation Electro-magnetic alignment assemblies
US4506205A (en) * 1983-06-10 1985-03-19 The Perkin-Elmer Corporation Electro-magnetic alignment apparatus
US4509002A (en) * 1983-12-20 1985-04-02 International Business Machines Corporation Precision X-Y positioner
US4694477A (en) * 1983-12-21 1987-09-15 Hewlett-Packard Company Flexure stage alignment apparatus
NL8500930A (nl) * 1985-03-29 1986-10-16 Philips Nv Verplaatsingsinrichting met voorgespannen contactloze lagers.

Also Published As

Publication number Publication date
ATE127940T1 (de) 1995-09-15
JPS62276612A (ja) 1987-12-01
EP0244012B1 (de) 1995-09-13
US4698575A (en) 1987-10-06
EP0244012A1 (de) 1987-11-04
DE3751515T2 (de) 1996-04-25
NL8601095A (nl) 1987-11-16
JPH083756B2 (ja) 1996-01-17

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee