JPS62158824U - - Google Patents

Info

Publication number
JPS62158824U
JPS62158824U JP4591786U JP4591786U JPS62158824U JP S62158824 U JPS62158824 U JP S62158824U JP 4591786 U JP4591786 U JP 4591786U JP 4591786 U JP4591786 U JP 4591786U JP S62158824 U JPS62158824 U JP S62158824U
Authority
JP
Japan
Prior art keywords
chuck
exposed
exposure apparatus
suction means
gas suction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4591786U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4591786U priority Critical patent/JPS62158824U/ja
Priority to NL8700445A priority patent/NL8700445A/nl
Priority to US07/019,223 priority patent/US4739545A/en
Priority to DE19873706327 priority patent/DE3706327C2/de
Priority to GB8704829A priority patent/GB2188263B/en
Publication of JPS62158824U publication Critical patent/JPS62158824U/ja
Pending legal-status Critical Current

Links

JP4591786U 1986-02-28 1986-03-28 Pending JPS62158824U (enrdf_load_stackoverflow)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP4591786U JPS62158824U (enrdf_load_stackoverflow) 1986-03-28 1986-03-28
NL8700445A NL8700445A (nl) 1986-02-28 1987-02-23 Positioneertafel voor een samengestelde beweging.
US07/019,223 US4739545A (en) 1986-02-28 1987-02-26 Composite movement table apparatus
DE19873706327 DE3706327C2 (de) 1986-02-28 1987-02-27 Bewegliche Verbundtischanordnung für die fotolithografische Herstellung
GB8704829A GB2188263B (en) 1986-02-28 1987-03-02 Composite movement table apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4591786U JPS62158824U (enrdf_load_stackoverflow) 1986-03-28 1986-03-28

Publications (1)

Publication Number Publication Date
JPS62158824U true JPS62158824U (enrdf_load_stackoverflow) 1987-10-08

Family

ID=30865093

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4591786U Pending JPS62158824U (enrdf_load_stackoverflow) 1986-02-28 1986-03-28

Country Status (1)

Country Link
JP (1) JPS62158824U (enrdf_load_stackoverflow)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59202812A (ja) * 1983-05-02 1984-11-16 松下電器産業株式会社 真空吸着固定式回転テ−ブル装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59202812A (ja) * 1983-05-02 1984-11-16 松下電器産業株式会社 真空吸着固定式回転テ−ブル装置

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