JPS621359B2 - - Google Patents
Info
- Publication number
- JPS621359B2 JPS621359B2 JP19028581A JP19028581A JPS621359B2 JP S621359 B2 JPS621359 B2 JP S621359B2 JP 19028581 A JP19028581 A JP 19028581A JP 19028581 A JP19028581 A JP 19028581A JP S621359 B2 JPS621359 B2 JP S621359B2
- Authority
- JP
- Japan
- Prior art keywords
- shutter
- reactor
- liquid phase
- epitaxial growth
- phase epitaxial
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000758 substrate Substances 0.000 claims description 27
- 239000004065 semiconductor Substances 0.000 claims description 14
- 239000007791 liquid phase Substances 0.000 claims description 12
- 238000006243 chemical reaction Methods 0.000 claims description 10
- 238000005192 partition Methods 0.000 claims description 4
- 239000013078 crystal Substances 0.000 claims description 2
- 239000007789 gas Substances 0.000 description 4
- 239000000725 suspension Substances 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- 239000002223 garnet Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 230000015654 memory Effects 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 238000001556 precipitation Methods 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 239000011819 refractory material Substances 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 231100000331 toxic Toxicity 0.000 description 1
- 230000002588 toxic effect Effects 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B19/00—Liquid-phase epitaxial-layer growth
- C30B19/06—Reaction chambers; Boats for supporting the melt; Substrate holders
- C30B19/062—Vertical dipping system
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Thin Magnetic Films (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19028581A JPS5891099A (ja) | 1981-11-27 | 1981-11-27 | 縦型液相エピタキシヤル成長装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19028581A JPS5891099A (ja) | 1981-11-27 | 1981-11-27 | 縦型液相エピタキシヤル成長装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5891099A JPS5891099A (ja) | 1983-05-30 |
| JPS621359B2 true JPS621359B2 (enrdf_load_stackoverflow) | 1987-01-13 |
Family
ID=16255621
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19028581A Granted JPS5891099A (ja) | 1981-11-27 | 1981-11-27 | 縦型液相エピタキシヤル成長装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5891099A (enrdf_load_stackoverflow) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60115271A (ja) * | 1983-11-28 | 1985-06-21 | Showa Denko Kk | リン化ガリウム赤色発光素子の製造方法 |
| JP5115413B2 (ja) * | 2008-09-09 | 2013-01-09 | トヨタ自動車株式会社 | 炭化珪素単結晶の製造装置および製造方法 |
-
1981
- 1981-11-27 JP JP19028581A patent/JPS5891099A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5891099A (ja) | 1983-05-30 |
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