JPS57206012A - Vertical type liquid epitaxial growing device - Google Patents
Vertical type liquid epitaxial growing deviceInfo
- Publication number
- JPS57206012A JPS57206012A JP9122581A JP9122581A JPS57206012A JP S57206012 A JPS57206012 A JP S57206012A JP 9122581 A JP9122581 A JP 9122581A JP 9122581 A JP9122581 A JP 9122581A JP S57206012 A JPS57206012 A JP S57206012A
- Authority
- JP
- Japan
- Prior art keywords
- furnace
- substrate
- section
- liquid epitaxial
- type liquid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To control temperature distribution in a furnace uniformly, by a method wherein a vertical furnace is divided into a section for pre-heating and slow cooling and a film producing furnace section, and a shutter is installed at dividing portion.
CONSTITUTION: A vertical furnace 3 is divided into a furnace section 3a which pre-heats a substrate 1 and cools it slowly and a furnace section 3b which makes a liquid epitaxial film grow, and a shutter mechanism 2b is installed at dividing portion. A holder 4 to hold the substrate 1 is supported by a support shaft 11. Gas is introduced from a gas introducing path 12 into the furnace sections 3a, 3b and exhausted out of the discharge ports 13a, 13b. The holder is moved to the furnace 3a, the shutter mechanism 2a is closed, the substrate 1 is pre-heated, and then the shutter mechanism 2b is opened and the substrate 1 is moved to the furnace section 3b. The mechanism 2 is closed and then immersed in a pot 6 thereby liquid epitaxial film is grown.
COPYRIGHT: (C)1982,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9122581A JPS57206012A (en) | 1981-06-12 | 1981-06-12 | Vertical type liquid epitaxial growing device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9122581A JPS57206012A (en) | 1981-06-12 | 1981-06-12 | Vertical type liquid epitaxial growing device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS57206012A true JPS57206012A (en) | 1982-12-17 |
Family
ID=14020474
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP9122581A Pending JPS57206012A (en) | 1981-06-12 | 1981-06-12 | Vertical type liquid epitaxial growing device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS57206012A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5603762A (en) * | 1994-05-31 | 1997-02-18 | Ngk Insulators, Ltd. | Process and apparatus for the production of films of oxide type single crystal |
-
1981
- 1981-06-12 JP JP9122581A patent/JPS57206012A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5603762A (en) * | 1994-05-31 | 1997-02-18 | Ngk Insulators, Ltd. | Process and apparatus for the production of films of oxide type single crystal |
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