JPS57206011A - Horizontal type liquid epitaxial growing device - Google Patents

Horizontal type liquid epitaxial growing device

Info

Publication number
JPS57206011A
JPS57206011A JP9122481A JP9122481A JPS57206011A JP S57206011 A JPS57206011 A JP S57206011A JP 9122481 A JP9122481 A JP 9122481A JP 9122481 A JP9122481 A JP 9122481A JP S57206011 A JPS57206011 A JP S57206011A
Authority
JP
Japan
Prior art keywords
furnace
substrate
section
shaft
liquid epitaxial
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9122481A
Other languages
Japanese (ja)
Inventor
Mikio Tanabe
Yasusuke Akai
Fumio Muramatsu
Shuichi Nakamura
Kazuo Hiura
Tetsuo Suzaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kokusai Electric Corp
Original Assignee
Kokusai Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kokusai Electric Corp filed Critical Kokusai Electric Corp
Priority to JP9122481A priority Critical patent/JPS57206011A/en
Publication of JPS57206011A publication Critical patent/JPS57206011A/en
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B19/00—Liquid-phase epitaxial-layer growth
    • C30B19/06—Reaction chambers; Boats for supporting the melt; Substrate holders
    • C30B19/061—Tipping system, e.g. by rotation

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Thin Magnetic Films (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)

Abstract

PURPOSE:To control temperature distribution in a furnace accurately, by a method wherein a horizontal furnace is employed and a shutter mechanism is installed in an opening of a section for pre-heating and slow cooling in the furnace. CONSTITUTION:A horizontal furnace 4 is divided into a furnace section 4a which pre-heats a substrate 8 and cools it slowly and a furnace section 4b which makes a liquid epitaxial film grow. A shutter mechanism 1a is installed in an opening of the furnace section 4a for pre-heating and slow cooling. A holder 7 to hold the the substrate 8 is supported by a support shaft 6 and moved in the furnace sections 4a, 4b by moving the shaft 6 in the axial direction. The shaft 6 moves the substance 8 in the furnace section 4a and the substance 8 is pre-heated after closing the shutter. Then, the shaft 6 moves the substrate 8 in the furnace section 4b where the substrate 8 is immersed within a solution 2 in a pot 3 and rotated along a circular arc thereby a liquid epitaxial film is grown on the substrate 8.
JP9122481A 1981-06-12 1981-06-12 Horizontal type liquid epitaxial growing device Pending JPS57206011A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9122481A JPS57206011A (en) 1981-06-12 1981-06-12 Horizontal type liquid epitaxial growing device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9122481A JPS57206011A (en) 1981-06-12 1981-06-12 Horizontal type liquid epitaxial growing device

Publications (1)

Publication Number Publication Date
JPS57206011A true JPS57206011A (en) 1982-12-17

Family

ID=14020444

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9122481A Pending JPS57206011A (en) 1981-06-12 1981-06-12 Horizontal type liquid epitaxial growing device

Country Status (1)

Country Link
JP (1) JPS57206011A (en)

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