JPS62133546U - - Google Patents
Info
- Publication number
- JPS62133546U JPS62133546U JP2115886U JP2115886U JPS62133546U JP S62133546 U JPS62133546 U JP S62133546U JP 2115886 U JP2115886 U JP 2115886U JP 2115886 U JP2115886 U JP 2115886U JP S62133546 U JPS62133546 U JP S62133546U
- Authority
- JP
- Japan
- Prior art keywords
- cassette
- substrates
- transported
- taken out
- state
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 claims 9
Landscapes
- Sheets, Magazines, And Separation Thereof (AREA)
- Pile Receivers (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1986021158U JPH0423858Y2 (US20090177143A1-20090709-C00008.png) | 1986-02-17 | 1986-02-17 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1986021158U JPH0423858Y2 (US20090177143A1-20090709-C00008.png) | 1986-02-17 | 1986-02-17 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS62133546U true JPS62133546U (US20090177143A1-20090709-C00008.png) | 1987-08-22 |
JPH0423858Y2 JPH0423858Y2 (US20090177143A1-20090709-C00008.png) | 1992-06-04 |
Family
ID=30817344
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1986021158U Expired JPH0423858Y2 (US20090177143A1-20090709-C00008.png) | 1986-02-17 | 1986-02-17 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0423858Y2 (US20090177143A1-20090709-C00008.png) |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS52156552A (en) * | 1976-06-23 | 1977-12-27 | Hitachi Ltd | Wafer inspection apparatus |
JPS5986143A (ja) * | 1982-11-09 | 1984-05-18 | Ulvac Corp | ウエハ自動交換装置 |
-
1986
- 1986-02-17 JP JP1986021158U patent/JPH0423858Y2/ja not_active Expired
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS52156552A (en) * | 1976-06-23 | 1977-12-27 | Hitachi Ltd | Wafer inspection apparatus |
JPS5986143A (ja) * | 1982-11-09 | 1984-05-18 | Ulvac Corp | ウエハ自動交換装置 |
Also Published As
Publication number | Publication date |
---|---|
JPH0423858Y2 (US20090177143A1-20090709-C00008.png) | 1992-06-04 |
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