JPS62133546U - - Google Patents

Info

Publication number
JPS62133546U
JPS62133546U JP2115886U JP2115886U JPS62133546U JP S62133546 U JPS62133546 U JP S62133546U JP 2115886 U JP2115886 U JP 2115886U JP 2115886 U JP2115886 U JP 2115886U JP S62133546 U JPS62133546 U JP S62133546U
Authority
JP
Japan
Prior art keywords
cassette
substrates
transported
taken out
state
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2115886U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0423858Y2 (US20080005853A1-20080110-C00027.png
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986021158U priority Critical patent/JPH0423858Y2/ja
Publication of JPS62133546U publication Critical patent/JPS62133546U/ja
Application granted granted Critical
Publication of JPH0423858Y2 publication Critical patent/JPH0423858Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Sheets, Magazines, And Separation Thereof (AREA)
  • Pile Receivers (AREA)
JP1986021158U 1986-02-17 1986-02-17 Expired JPH0423858Y2 (US20080005853A1-20080110-C00027.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986021158U JPH0423858Y2 (US20080005853A1-20080110-C00027.png) 1986-02-17 1986-02-17

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986021158U JPH0423858Y2 (US20080005853A1-20080110-C00027.png) 1986-02-17 1986-02-17

Publications (2)

Publication Number Publication Date
JPS62133546U true JPS62133546U (US20080005853A1-20080110-C00027.png) 1987-08-22
JPH0423858Y2 JPH0423858Y2 (US20080005853A1-20080110-C00027.png) 1992-06-04

Family

ID=30817344

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986021158U Expired JPH0423858Y2 (US20080005853A1-20080110-C00027.png) 1986-02-17 1986-02-17

Country Status (1)

Country Link
JP (1) JPH0423858Y2 (US20080005853A1-20080110-C00027.png)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52156552A (en) * 1976-06-23 1977-12-27 Hitachi Ltd Wafer inspection apparatus
JPS5986143A (ja) * 1982-11-09 1984-05-18 Ulvac Corp ウエハ自動交換装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52156552A (en) * 1976-06-23 1977-12-27 Hitachi Ltd Wafer inspection apparatus
JPS5986143A (ja) * 1982-11-09 1984-05-18 Ulvac Corp ウエハ自動交換装置

Also Published As

Publication number Publication date
JPH0423858Y2 (US20080005853A1-20080110-C00027.png) 1992-06-04

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