JPS6213045A - ウエハ異物検査装置 - Google Patents

ウエハ異物検査装置

Info

Publication number
JPS6213045A
JPS6213045A JP15187885A JP15187885A JPS6213045A JP S6213045 A JPS6213045 A JP S6213045A JP 15187885 A JP15187885 A JP 15187885A JP 15187885 A JP15187885 A JP 15187885A JP S6213045 A JPS6213045 A JP S6213045A
Authority
JP
Japan
Prior art keywords
wafer
foreign matter
offset angle
foreign
stage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15187885A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0363818B2 (enrdf_load_stackoverflow
Inventor
Toshiaki Taniuchi
谷内　俊明
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi High Tech Corp
Original Assignee
Hitachi Electronics Engineering Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Electronics Engineering Co Ltd filed Critical Hitachi Electronics Engineering Co Ltd
Priority to JP15187885A priority Critical patent/JPS6213045A/ja
Publication of JPS6213045A publication Critical patent/JPS6213045A/ja
Publication of JPH0363818B2 publication Critical patent/JPH0363818B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP15187885A 1985-07-10 1985-07-10 ウエハ異物検査装置 Granted JPS6213045A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15187885A JPS6213045A (ja) 1985-07-10 1985-07-10 ウエハ異物検査装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15187885A JPS6213045A (ja) 1985-07-10 1985-07-10 ウエハ異物検査装置

Publications (2)

Publication Number Publication Date
JPS6213045A true JPS6213045A (ja) 1987-01-21
JPH0363818B2 JPH0363818B2 (enrdf_load_stackoverflow) 1991-10-02

Family

ID=15528177

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15187885A Granted JPS6213045A (ja) 1985-07-10 1985-07-10 ウエハ異物検査装置

Country Status (1)

Country Link
JP (1) JPS6213045A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03102847A (ja) * 1989-09-16 1991-04-30 Hitachi Ltd オリエンテーシヨンフラツトの検出方法及び検出装置並びに縮小投影露光装置
JPH04368146A (ja) * 1991-06-14 1992-12-21 Ratotsuku Syst Eng Kk ウェハ表面の検査装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03102847A (ja) * 1989-09-16 1991-04-30 Hitachi Ltd オリエンテーシヨンフラツトの検出方法及び検出装置並びに縮小投影露光装置
JPH04368146A (ja) * 1991-06-14 1992-12-21 Ratotsuku Syst Eng Kk ウェハ表面の検査装置

Also Published As

Publication number Publication date
JPH0363818B2 (enrdf_load_stackoverflow) 1991-10-02

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