JPS62130275A - 放射線導入窓 - Google Patents

放射線導入窓

Info

Publication number
JPS62130275A
JPS62130275A JP27111385A JP27111385A JPS62130275A JP S62130275 A JPS62130275 A JP S62130275A JP 27111385 A JP27111385 A JP 27111385A JP 27111385 A JP27111385 A JP 27111385A JP S62130275 A JPS62130275 A JP S62130275A
Authority
JP
Japan
Prior art keywords
radiation
ring
film
vacuum
glass plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP27111385A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0521981B2 (enExample
Inventor
Isamu Morisako
勇 森迫
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Anelva Corp
Original Assignee
Anelva Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Anelva Corp filed Critical Anelva Corp
Priority to JP27111385A priority Critical patent/JPS62130275A/ja
Publication of JPS62130275A publication Critical patent/JPS62130275A/ja
Publication of JPH0521981B2 publication Critical patent/JPH0521981B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Chemical Vapour Deposition (AREA)
JP27111385A 1985-12-02 1985-12-02 放射線導入窓 Granted JPS62130275A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP27111385A JPS62130275A (ja) 1985-12-02 1985-12-02 放射線導入窓

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP27111385A JPS62130275A (ja) 1985-12-02 1985-12-02 放射線導入窓

Publications (2)

Publication Number Publication Date
JPS62130275A true JPS62130275A (ja) 1987-06-12
JPH0521981B2 JPH0521981B2 (enExample) 1993-03-26

Family

ID=17495515

Family Applications (1)

Application Number Title Priority Date Filing Date
JP27111385A Granted JPS62130275A (ja) 1985-12-02 1985-12-02 放射線導入窓

Country Status (1)

Country Link
JP (1) JPS62130275A (enExample)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006529018A (ja) * 2003-05-20 2006-12-28 ハイダック フルイドテヒニク ゲゼルシャフト ミット ベシュレンクテル ハフツング モジュール式バルブ装置
JP2020038997A (ja) * 2019-11-28 2020-03-12 株式会社日立ハイテクノロジーズ 真空処理装置
US10937635B2 (en) 2016-02-10 2021-03-02 Hitachi High-Tech Corporation Vacuum processing apparatus

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006529018A (ja) * 2003-05-20 2006-12-28 ハイダック フルイドテヒニク ゲゼルシャフト ミット ベシュレンクテル ハフツング モジュール式バルブ装置
US10937635B2 (en) 2016-02-10 2021-03-02 Hitachi High-Tech Corporation Vacuum processing apparatus
US11557463B2 (en) 2016-02-10 2023-01-17 Hitachi High-Tech Corporation Vacuum processing apparatus
JP2020038997A (ja) * 2019-11-28 2020-03-12 株式会社日立ハイテクノロジーズ 真空処理装置

Also Published As

Publication number Publication date
JPH0521981B2 (enExample) 1993-03-26

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Legal Events

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R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

EXPY Cancellation because of completion of term