JPS62117507U - - Google Patents
Info
- Publication number
- JPS62117507U JPS62117507U JP479186U JP479186U JPS62117507U JP S62117507 U JPS62117507 U JP S62117507U JP 479186 U JP479186 U JP 479186U JP 479186 U JP479186 U JP 479186U JP S62117507 U JPS62117507 U JP S62117507U
- Authority
- JP
- Japan
- Prior art keywords
- electron beam
- microscope
- deflector
- electron
- points
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010894 electron beam technology Methods 0.000 claims 2
- 230000001133 acceleration Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 5
- 238000005259 measurement Methods 0.000 description 2
Landscapes
- Length-Measuring Devices Using Wave Or Particle Radiation (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP479186U JPH0516491Y2 (enExample) | 1986-01-16 | 1986-01-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP479186U JPH0516491Y2 (enExample) | 1986-01-16 | 1986-01-16 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62117507U true JPS62117507U (enExample) | 1987-07-25 |
| JPH0516491Y2 JPH0516491Y2 (enExample) | 1993-04-30 |
Family
ID=30785780
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP479186U Expired - Lifetime JPH0516491Y2 (enExample) | 1986-01-16 | 1986-01-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0516491Y2 (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6414854A (en) * | 1987-07-08 | 1989-01-19 | Nikon Corp | Electron microscope for length measurement |
-
1986
- 1986-01-16 JP JP479186U patent/JPH0516491Y2/ja not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6414854A (en) * | 1987-07-08 | 1989-01-19 | Nikon Corp | Electron microscope for length measurement |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0516491Y2 (enExample) | 1993-04-30 |
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