JPS61140906U - - Google Patents
Info
- Publication number
- JPS61140906U JPS61140906U JP2395485U JP2395485U JPS61140906U JP S61140906 U JPS61140906 U JP S61140906U JP 2395485 U JP2395485 U JP 2395485U JP 2395485 U JP2395485 U JP 2395485U JP S61140906 U JPS61140906 U JP S61140906U
- Authority
- JP
- Japan
- Prior art keywords
- pattern
- detection system
- line width
- image
- measuring device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001514 detection method Methods 0.000 claims 2
- 238000010894 electron beam technology Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 230000007274 generation of a signal involved in cell-cell signaling Effects 0.000 description 1
Landscapes
- Length-Measuring Devices Using Wave Or Particle Radiation (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2395485U JPS61140906U (enExample) | 1985-02-21 | 1985-02-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2395485U JPS61140906U (enExample) | 1985-02-21 | 1985-02-21 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61140906U true JPS61140906U (enExample) | 1986-09-01 |
Family
ID=30517658
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2395485U Pending JPS61140906U (enExample) | 1985-02-21 | 1985-02-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61140906U (enExample) |
-
1985
- 1985-02-21 JP JP2395485U patent/JPS61140906U/ja active Pending
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