JPS6211514B2 - - Google Patents

Info

Publication number
JPS6211514B2
JPS6211514B2 JP50095600A JP9560075A JPS6211514B2 JP S6211514 B2 JPS6211514 B2 JP S6211514B2 JP 50095600 A JP50095600 A JP 50095600A JP 9560075 A JP9560075 A JP 9560075A JP S6211514 B2 JPS6211514 B2 JP S6211514B2
Authority
JP
Japan
Prior art keywords
oxide film
insulating film
silicon oxide
conductivity type
forming
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP50095600A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5219968A (en
Inventor
Tooru Tsujiide
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Co Ltd filed Critical Nippon Electric Co Ltd
Priority to JP50095600A priority Critical patent/JPS5219968A/ja
Publication of JPS5219968A publication Critical patent/JPS5219968A/ja
Publication of JPS6211514B2 publication Critical patent/JPS6211514B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
JP50095600A 1975-08-06 1975-08-06 Semiconductor ic manufacturig process Granted JPS5219968A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50095600A JPS5219968A (en) 1975-08-06 1975-08-06 Semiconductor ic manufacturig process

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50095600A JPS5219968A (en) 1975-08-06 1975-08-06 Semiconductor ic manufacturig process

Publications (2)

Publication Number Publication Date
JPS5219968A JPS5219968A (en) 1977-02-15
JPS6211514B2 true JPS6211514B2 (enExample) 1987-03-12

Family

ID=14142037

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50095600A Granted JPS5219968A (en) 1975-08-06 1975-08-06 Semiconductor ic manufacturig process

Country Status (1)

Country Link
JP (1) JPS5219968A (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01138525U (enExample) * 1988-03-07 1989-09-21
JPH0253321U (enExample) * 1988-10-08 1990-04-17

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS586126A (ja) * 1981-07-03 1983-01-13 Fujitsu Ltd 半導体装置の製造方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01138525U (enExample) * 1988-03-07 1989-09-21
JPH0253321U (enExample) * 1988-10-08 1990-04-17

Also Published As

Publication number Publication date
JPS5219968A (en) 1977-02-15

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