JPS6210999Y2 - - Google Patents
Info
- Publication number
- JPS6210999Y2 JPS6210999Y2 JP7684082U JP7684082U JPS6210999Y2 JP S6210999 Y2 JPS6210999 Y2 JP S6210999Y2 JP 7684082 U JP7684082 U JP 7684082U JP 7684082 U JP7684082 U JP 7684082U JP S6210999 Y2 JPS6210999 Y2 JP S6210999Y2
- Authority
- JP
- Japan
- Prior art keywords
- wafer cassette
- elevator table
- wafer
- detection lever
- elevator
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000001514 detection method Methods 0.000 claims description 35
- 238000006073 displacement reaction Methods 0.000 claims 4
- 235000012431 wafers Nutrition 0.000 description 87
- 239000011295 pitch Substances 0.000 description 3
- 230000004907 flux Effects 0.000 description 2
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 2
- 230000007774 longterm Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000007257 malfunction Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
Landscapes
- Warehouses Or Storage Devices (AREA)
- Sheets, Magazines, And Separation Thereof (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7684082U JPS58180634U (ja) | 1982-05-24 | 1982-05-24 | ウエハカセツトの位置決め検知装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7684082U JPS58180634U (ja) | 1982-05-24 | 1982-05-24 | ウエハカセツトの位置決め検知装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS58180634U JPS58180634U (ja) | 1983-12-02 |
| JPS6210999Y2 true JPS6210999Y2 (enEXAMPLES) | 1987-03-16 |
Family
ID=30086133
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7684082U Granted JPS58180634U (ja) | 1982-05-24 | 1982-05-24 | ウエハカセツトの位置決め検知装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58180634U (enEXAMPLES) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0322186Y2 (enEXAMPLES) * | 1985-03-06 | 1991-05-15 |
-
1982
- 1982-05-24 JP JP7684082U patent/JPS58180634U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS58180634U (ja) | 1983-12-02 |
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