JPS62106352A - 走査型ｘ線顕微鏡 - Google Patents

走査型ｘ線顕微鏡

Info

Publication number
JPS62106352A
JPS62106352A JP60246510A JP24651085A JPS62106352A JP S62106352 A JPS62106352 A JP S62106352A JP 60246510 A JP60246510 A JP 60246510A JP 24651085 A JP24651085 A JP 24651085A JP S62106352 A JPS62106352 A JP S62106352A
Authority
JP
Japan
Prior art keywords
ray
image
rays
sample
scanning
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP60246510A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0543080B2 (enrdf_load_stackoverflow
Inventor
Hiromoto Nakazawa
中沢　弘基
Koji Nozaki
浩司 野崎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute for Materials Science
Original Assignee
National Institute for Research in Inorganic Material
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by National Institute for Research in Inorganic Material filed Critical National Institute for Research in Inorganic Material
Priority to JP60246510A priority Critical patent/JPS62106352A/ja
Publication of JPS62106352A publication Critical patent/JPS62106352A/ja
Publication of JPH0543080B2 publication Critical patent/JPH0543080B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
    • G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
    • G21K7/00—Gamma- or X-ray microscopes

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
JP60246510A 1985-11-01 1985-11-01 走査型ｘ線顕微鏡 Granted JPS62106352A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60246510A JPS62106352A (ja) 1985-11-01 1985-11-01 走査型ｘ線顕微鏡

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60246510A JPS62106352A (ja) 1985-11-01 1985-11-01 走査型ｘ線顕微鏡

Publications (2)

Publication Number Publication Date
JPS62106352A true JPS62106352A (ja) 1987-05-16
JPH0543080B2 JPH0543080B2 (enrdf_load_stackoverflow) 1993-06-30

Family

ID=17149462

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60246510A Granted JPS62106352A (ja) 1985-11-01 1985-11-01 走査型ｘ線顕微鏡

Country Status (1)

Country Link
JP (1) JPS62106352A (enrdf_load_stackoverflow)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01141343A (ja) * 1987-11-27 1989-06-02 Hitachi Ltd Ｘ線分析装置及びｘ線分析方法
JPH01316683A (ja) * 1988-06-17 1989-12-21 Natl Inst For Res In Inorg Mater Ｘ線検出装置
JPH04204399A (ja) * 1990-11-30 1992-07-24 Seiko Instr Inc 軟ｘ線集光器
WO2005026708A1 (ja) * 2003-09-10 2005-03-24 National Institute For Materials Science Ｘ線回折顕微鏡装置およびｘ線回折顕微鏡装置によるｘ線回折測定方法
JP2009505111A (ja) * 2005-08-22 2009-02-05 ユニサンティス ヨーロッパ ゲーエムベーハー Ｘ線レンズ位置決め装置、ｘ線装置、およびｘ線レンズの位置決め方法
JP2009097937A (ja) * 2007-10-16 2009-05-07 Fujitsu Ltd 試料分析装置、試料分析方法および試料分析プログラム

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01141343A (ja) * 1987-11-27 1989-06-02 Hitachi Ltd Ｘ線分析装置及びｘ線分析方法
JPH01316683A (ja) * 1988-06-17 1989-12-21 Natl Inst For Res In Inorg Mater Ｘ線検出装置
JPH04204399A (ja) * 1990-11-30 1992-07-24 Seiko Instr Inc 軟ｘ線集光器
WO2005026708A1 (ja) * 2003-09-10 2005-03-24 National Institute For Materials Science Ｘ線回折顕微鏡装置およびｘ線回折顕微鏡装置によるｘ線回折測定方法
JP2009505111A (ja) * 2005-08-22 2009-02-05 ユニサンティス ヨーロッパ ゲーエムベーハー Ｘ線レンズ位置決め装置、ｘ線装置、およびｘ線レンズの位置決め方法
JP2009097937A (ja) * 2007-10-16 2009-05-07 Fujitsu Ltd 試料分析装置、試料分析方法および試料分析プログラム

Also Published As

Publication number Publication date
JPH0543080B2 (enrdf_load_stackoverflow) 1993-06-30

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term