JPH0543080B2 - - Google Patents

Info

Publication number
JPH0543080B2
JPH0543080B2 JP60246510A JP24651085A JPH0543080B2 JP H0543080 B2 JPH0543080 B2 JP H0543080B2 JP 60246510 A JP60246510 A JP 60246510A JP 24651085 A JP24651085 A JP 24651085A JP H0543080 B2 JPH0543080 B2 JP H0543080B2
Authority
JP
Japan
Prior art keywords
ray
rays
sample
image
conduit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP60246510A
Other languages
English (en)
Japanese (ja)
Other versions
JPS62106352A (ja
Inventor
Hiromoto Nakazawa
Koji Nozaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute for Materials Science
Original Assignee
National Institute for Research in Inorganic Material
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by National Institute for Research in Inorganic Material filed Critical National Institute for Research in Inorganic Material
Priority to JP60246510A priority Critical patent/JPS62106352A/ja
Publication of JPS62106352A publication Critical patent/JPS62106352A/ja
Publication of JPH0543080B2 publication Critical patent/JPH0543080B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
    • G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
    • G21K7/00—Gamma- or X-ray microscopes

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
JP60246510A 1985-11-01 1985-11-01 走査型ｘ線顕微鏡 Granted JPS62106352A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60246510A JPS62106352A (ja) 1985-11-01 1985-11-01 走査型ｘ線顕微鏡

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60246510A JPS62106352A (ja) 1985-11-01 1985-11-01 走査型ｘ線顕微鏡

Publications (2)

Publication Number Publication Date
JPS62106352A JPS62106352A (ja) 1987-05-16
JPH0543080B2 true JPH0543080B2 (enrdf_load_stackoverflow) 1993-06-30

Family

ID=17149462

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60246510A Granted JPS62106352A (ja) 1985-11-01 1985-11-01 走査型ｘ線顕微鏡

Country Status (1)

Country Link
JP (1) JPS62106352A (enrdf_load_stackoverflow)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2742415B2 (ja) * 1987-11-27 1998-04-22 株式会社日立製作所 Ｘ線分析装置
JP2799994B2 (ja) * 1988-06-17 1998-09-21 科学技術庁無機材質研究所長 Ｘ線検出装置
JPH04204399A (ja) * 1990-11-30 1992-07-24 Seiko Instr Inc 軟ｘ線集光器
JP3834652B2 (ja) * 2003-09-10 2006-10-18 独立行政法人物質・材料研究機構 Ｘ線回折顕微鏡装置およびｘ線回折顕微鏡装置によるｘ線回折測定方法
ATE423382T1 (de) * 2005-08-22 2009-03-15 Unisantis Fze Vorrichtung und verfahren zum positionieren einer röntgenlinse und röntgengerät mit einer solchen vorrichtung
JP5145854B2 (ja) * 2007-10-16 2013-02-20 富士通株式会社 試料分析装置、試料分析方法および試料分析プログラム

Also Published As

Publication number Publication date
JPS62106352A (ja) 1987-05-16

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term