JPS62102854A - 回転処理装置 - Google Patents

回転処理装置

Info

Publication number
JPS62102854A
JPS62102854A JP60240673A JP24067385A JPS62102854A JP S62102854 A JPS62102854 A JP S62102854A JP 60240673 A JP60240673 A JP 60240673A JP 24067385 A JP24067385 A JP 24067385A JP S62102854 A JPS62102854 A JP S62102854A
Authority
JP
Japan
Prior art keywords
cup
wind speed
speed sensor
exhaust
gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP60240673A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0472590B2 (enExample
Inventor
Nobutoshi Ogami
大神　信敏
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dainippon Screen Manufacturing Co Ltd
Original Assignee
Dainippon Screen Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dainippon Screen Manufacturing Co Ltd filed Critical Dainippon Screen Manufacturing Co Ltd
Priority to JP60240673A priority Critical patent/JPS62102854A/ja
Publication of JPS62102854A publication Critical patent/JPS62102854A/ja
Publication of JPH0472590B2 publication Critical patent/JPH0472590B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Application Of Or Painting With Fluid Materials (AREA)
  • Coating Apparatus (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP60240673A 1985-10-29 1985-10-29 回転処理装置 Granted JPS62102854A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60240673A JPS62102854A (ja) 1985-10-29 1985-10-29 回転処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60240673A JPS62102854A (ja) 1985-10-29 1985-10-29 回転処理装置

Publications (2)

Publication Number Publication Date
JPS62102854A true JPS62102854A (ja) 1987-05-13
JPH0472590B2 JPH0472590B2 (enExample) 1992-11-18

Family

ID=17062999

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60240673A Granted JPS62102854A (ja) 1985-10-29 1985-10-29 回転処理装置

Country Status (1)

Country Link
JP (1) JPS62102854A (enExample)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63313160A (ja) * 1987-06-16 1988-12-21 Dainippon Printing Co Ltd フォトマスク用基板等へのレジスト塗布方法およびスピンナチャック装置
JPH0346518A (ja) * 1989-07-14 1991-02-27 Tokyo Electron Ltd 流速測定装置
US5070813A (en) * 1989-02-10 1991-12-10 Tokyo Electron Limited Coating apparatus
JPH0451246A (ja) * 1990-06-20 1992-02-19 Nec Kyushu Ltd 露光パターン形成装置
KR100714263B1 (ko) * 2000-11-09 2007-05-02 삼성전자주식회사 반도체 코팅설비의 풍속변화에 의한 에러감지장치
JP2014175581A (ja) * 2013-03-12 2014-09-22 Tokyo Electron Ltd 基板液処理装置および気流異常検出方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58171819A (ja) * 1982-04-01 1983-10-08 Toshiba Corp 半導体処理装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58171819A (ja) * 1982-04-01 1983-10-08 Toshiba Corp 半導体処理装置

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63313160A (ja) * 1987-06-16 1988-12-21 Dainippon Printing Co Ltd フォトマスク用基板等へのレジスト塗布方法およびスピンナチャック装置
US5070813A (en) * 1989-02-10 1991-12-10 Tokyo Electron Limited Coating apparatus
JPH0346518A (ja) * 1989-07-14 1991-02-27 Tokyo Electron Ltd 流速測定装置
JPH0451246A (ja) * 1990-06-20 1992-02-19 Nec Kyushu Ltd 露光パターン形成装置
KR100714263B1 (ko) * 2000-11-09 2007-05-02 삼성전자주식회사 반도체 코팅설비의 풍속변화에 의한 에러감지장치
JP2014175581A (ja) * 2013-03-12 2014-09-22 Tokyo Electron Ltd 基板液処理装置および気流異常検出方法

Also Published As

Publication number Publication date
JPH0472590B2 (enExample) 1992-11-18

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