JPS6210010B2 - - Google Patents

Info

Publication number
JPS6210010B2
JPS6210010B2 JP54064258A JP6425879A JPS6210010B2 JP S6210010 B2 JPS6210010 B2 JP S6210010B2 JP 54064258 A JP54064258 A JP 54064258A JP 6425879 A JP6425879 A JP 6425879A JP S6210010 B2 JPS6210010 B2 JP S6210010B2
Authority
JP
Japan
Prior art keywords
resist
electron beam
pattern
burrs
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP54064258A
Other languages
English (en)
Japanese (ja)
Other versions
JPS55156328A (en
Inventor
Masaki Ito
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Co Ltd filed Critical Nippon Electric Co Ltd
Priority to JP6425879A priority Critical patent/JPS55156328A/ja
Publication of JPS55156328A publication Critical patent/JPS55156328A/ja
Publication of JPS6210010B2 publication Critical patent/JPS6210010B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10P95/00—

Landscapes

  • Electron Beam Exposure (AREA)
JP6425879A 1979-05-24 1979-05-24 Manufacture for integrated element Granted JPS55156328A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6425879A JPS55156328A (en) 1979-05-24 1979-05-24 Manufacture for integrated element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6425879A JPS55156328A (en) 1979-05-24 1979-05-24 Manufacture for integrated element

Publications (2)

Publication Number Publication Date
JPS55156328A JPS55156328A (en) 1980-12-05
JPS6210010B2 true JPS6210010B2 (show.php) 1987-03-04

Family

ID=13252974

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6425879A Granted JPS55156328A (en) 1979-05-24 1979-05-24 Manufacture for integrated element

Country Status (1)

Country Link
JP (1) JPS55156328A (show.php)

Also Published As

Publication number Publication date
JPS55156328A (en) 1980-12-05

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