JPS6210007B2 - - Google Patents

Info

Publication number
JPS6210007B2
JPS6210007B2 JP53112076A JP11207678A JPS6210007B2 JP S6210007 B2 JPS6210007 B2 JP S6210007B2 JP 53112076 A JP53112076 A JP 53112076A JP 11207678 A JP11207678 A JP 11207678A JP S6210007 B2 JPS6210007 B2 JP S6210007B2
Authority
JP
Japan
Prior art keywords
film
openings
photosensitive resin
emulsion type
impurities
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP53112076A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5538085A (en
Inventor
Manzo Saito
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Co Ltd filed Critical Nippon Electric Co Ltd
Priority to JP11207678A priority Critical patent/JPS5538085A/ja
Publication of JPS5538085A publication Critical patent/JPS5538085A/ja
Publication of JPS6210007B2 publication Critical patent/JPS6210007B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Weting (AREA)
JP11207678A 1978-09-11 1978-09-11 Production of semiconductor device Granted JPS5538085A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11207678A JPS5538085A (en) 1978-09-11 1978-09-11 Production of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11207678A JPS5538085A (en) 1978-09-11 1978-09-11 Production of semiconductor device

Publications (2)

Publication Number Publication Date
JPS5538085A JPS5538085A (en) 1980-03-17
JPS6210007B2 true JPS6210007B2 (enrdf_load_stackoverflow) 1987-03-04

Family

ID=14577462

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11207678A Granted JPS5538085A (en) 1978-09-11 1978-09-11 Production of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5538085A (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5087834B2 (ja) * 2005-11-15 2012-12-05 日産自動車株式会社 半導体装置の製造方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50138769A (enrdf_load_stackoverflow) * 1974-04-23 1975-11-05
JPS5391676A (en) * 1977-01-24 1978-08-11 Matsushita Electric Ind Co Ltd Manufacture for semiconductor device

Also Published As

Publication number Publication date
JPS5538085A (en) 1980-03-17

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