JPS6178180A - 圧電セラミツク製たわみ素子とその製法 - Google Patents
圧電セラミツク製たわみ素子とその製法Info
- Publication number
- JPS6178180A JPS6178180A JP60205154A JP20515485A JPS6178180A JP S6178180 A JPS6178180 A JP S6178180A JP 60205154 A JP60205154 A JP 60205154A JP 20515485 A JP20515485 A JP 20515485A JP S6178180 A JPS6178180 A JP S6178180A
- Authority
- JP
- Japan
- Prior art keywords
- layer
- flexible element
- ceramic
- electrode
- zone
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000919 ceramic Substances 0.000 title claims description 36
- 238000004519 manufacturing process Methods 0.000 title claims description 10
- 239000000463 material Substances 0.000 claims description 17
- 238000000034 method Methods 0.000 claims description 16
- 229910010293 ceramic material Inorganic materials 0.000 claims description 11
- 230000010287 polarization Effects 0.000 claims description 11
- 229910052751 metal Inorganic materials 0.000 claims description 8
- 239000002184 metal Substances 0.000 claims description 8
- 239000002245 particle Substances 0.000 claims description 8
- 238000005245 sintering Methods 0.000 claims description 5
- 239000002002 slurry Substances 0.000 claims description 5
- 230000005284 excitation Effects 0.000 claims description 3
- 238000002844 melting Methods 0.000 claims description 3
- 230000008018 melting Effects 0.000 claims description 3
- 238000011282 treatment Methods 0.000 claims description 2
- 239000000945 filler Substances 0.000 claims 3
- 238000009434 installation Methods 0.000 claims 1
- 238000007650 screen-printing Methods 0.000 claims 1
- 239000010410 layer Substances 0.000 description 50
- 239000011888 foil Substances 0.000 description 11
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 4
- 238000000926 separation method Methods 0.000 description 4
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 3
- 229910002804 graphite Inorganic materials 0.000 description 3
- 239000010439 graphite Substances 0.000 description 3
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 229910052697 platinum Inorganic materials 0.000 description 2
- 239000007858 starting material Substances 0.000 description 2
- 241000272201 Columbiformes Species 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 description 1
- MCMNRKCIXSYSNV-UHFFFAOYSA-N ZrO2 Inorganic materials O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 1
- 238000001467 acupuncture Methods 0.000 description 1
- 229910002113 barium titanate Inorganic materials 0.000 description 1
- JRPBQTZRNDNNOP-UHFFFAOYSA-N barium titanate Chemical compound [Ba+2].[Ba+2].[O-][Ti]([O-])([O-])[O-] JRPBQTZRNDNNOP-UHFFFAOYSA-N 0.000 description 1
- FFBHFFJDDLITSX-UHFFFAOYSA-N benzyl N-[2-hydroxy-4-(3-oxomorpholin-4-yl)phenyl]carbamate Chemical compound OC1=C(NC(=O)OCC2=CC=CC=C2)C=CC(=C1)N1CCOCC1=O FFBHFFJDDLITSX-UHFFFAOYSA-N 0.000 description 1
- 239000011230 binding agent Substances 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 239000011247 coating layer Substances 0.000 description 1
- 238000002485 combustion reaction Methods 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 239000007772 electrode material Substances 0.000 description 1
- 238000005429 filling process Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000003292 glue Substances 0.000 description 1
- 150000002343 gold Chemical class 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- CPLXHLVBOLITMK-UHFFFAOYSA-N magnesium oxide Inorganic materials [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 description 1
- 239000000395 magnesium oxide Substances 0.000 description 1
- AXZKOIWUVFPNLO-UHFFFAOYSA-N magnesium;oxygen(2-) Chemical compound [O-2].[Mg+2] AXZKOIWUVFPNLO-UHFFFAOYSA-N 0.000 description 1
- 230000028161 membrane depolarization Effects 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 description 1
- 238000005204 segregation Methods 0.000 description 1
- 230000001568 sexual effect Effects 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 229910052726 zirconium Inorganic materials 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/87—Electrodes or interconnections, e.g. leads or terminals
- H10N30/871—Single-layered electrodes of multilayer piezoelectric or electrostrictive devices, e.g. internal electrodes
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/01—Manufacture or treatment
- H10N30/05—Manufacture of multilayered piezoelectric or electrostrictive devices, or parts thereof, e.g. by stacking piezoelectric bodies and electrodes
- H10N30/053—Manufacture of multilayered piezoelectric or electrostrictive devices, or parts thereof, e.g. by stacking piezoelectric bodies and electrodes by integrally sintering piezoelectric or electrostrictive bodies and electrodes
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
- H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/50—Piezoelectric or electrostrictive devices having a stacked or multilayer structure
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Compositions Of Oxide Ceramics (AREA)
- Transducers For Ultrasonic Waves (AREA)
- Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE19843434729 DE3434729A1 (de) | 1984-09-21 | 1984-09-21 | Biegeelement aus piezokeramik und verfahren zu seiner herstellung |
| DE3434729.1 | 1984-09-21 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6178180A true JPS6178180A (ja) | 1986-04-21 |
Family
ID=6246012
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60205154A Pending JPS6178180A (ja) | 1984-09-21 | 1985-09-17 | 圧電セラミツク製たわみ素子とその製法 |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JPS6178180A (enrdf_load_stackoverflow) |
| DE (1) | DE3434729A1 (enrdf_load_stackoverflow) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0311980A (ja) * | 1989-06-09 | 1991-01-21 | Avx Corp | セラミック アクチュエータ及びその製法 |
Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4633122A (en) * | 1985-06-18 | 1986-12-30 | Pennwalt Corporation | Means for electrically connecting electrodes on different surfaces of piezoelectric polymeric films |
| US4734044A (en) * | 1986-04-18 | 1988-03-29 | Radice Peter F | Connectors for use with piezoelectric polymeric film transducers |
| DE3824139A1 (de) * | 1988-07-15 | 1990-01-25 | Siemens Ag | Elektroden fuer piezokeramiken |
| JPH02138501A (ja) * | 1988-11-17 | 1990-05-28 | Smc Corp | ノズルフラッパ機構 |
| DE4031623C1 (enrdf_load_stackoverflow) * | 1990-10-05 | 1992-03-12 | Siemens Ag, 8000 Muenchen, De | |
| JPH11191645A (ja) * | 1997-12-25 | 1999-07-13 | Kyocera Corp | 圧電／電歪膜型アクチュエータ |
| DE19829216C1 (de) * | 1998-06-30 | 2000-03-02 | Fraunhofer Ges Forschung | Elektromechanischer Wandler und Verfahren zur Herstellung |
| JP3551141B2 (ja) * | 2000-09-28 | 2004-08-04 | 松下電器産業株式会社 | 圧電体の製造方法 |
| DE102006022600B4 (de) * | 2006-05-15 | 2008-02-14 | Siemens Ag | Herstellungsverfahren eines Piezoaktors |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3378704A (en) * | 1966-01-05 | 1968-04-16 | Bourns Inc | Piezoelectric multilayer device |
-
1984
- 1984-09-21 DE DE19843434729 patent/DE3434729A1/de active Granted
-
1985
- 1985-09-17 JP JP60205154A patent/JPS6178180A/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0311980A (ja) * | 1989-06-09 | 1991-01-21 | Avx Corp | セラミック アクチュエータ及びその製法 |
Also Published As
| Publication number | Publication date |
|---|---|
| DE3434729A1 (de) | 1986-04-03 |
| DE3434729C2 (enrdf_load_stackoverflow) | 1990-12-13 |
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