DE3434729A1 - Biegeelement aus piezokeramik und verfahren zu seiner herstellung - Google Patents

Biegeelement aus piezokeramik und verfahren zu seiner herstellung

Info

Publication number
DE3434729A1
DE3434729A1 DE19843434729 DE3434729A DE3434729A1 DE 3434729 A1 DE3434729 A1 DE 3434729A1 DE 19843434729 DE19843434729 DE 19843434729 DE 3434729 A DE3434729 A DE 3434729A DE 3434729 A1 DE3434729 A1 DE 3434729A1
Authority
DE
Germany
Prior art keywords
bending element
layers
ceramic
zones
electrodes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
DE19843434729
Other languages
German (de)
English (en)
Other versions
DE3434729C2 (enrdf_load_stackoverflow
Inventor
Karl Dr. 8012 Ottobrunn Lubitz
Jutta 8000 München Mohaupt
Manfred Dr. 8048 Haimhausen Schnöller
Wolfram Dipl.-Phys. 8011 Kirchheim Wersing
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Siemens Corp
Original Assignee
Siemens AG
Siemens Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens AG, Siemens Corp filed Critical Siemens AG
Priority to DE19843434729 priority Critical patent/DE3434729A1/de
Priority to JP60205154A priority patent/JPS6178180A/ja
Publication of DE3434729A1 publication Critical patent/DE3434729A1/de
Application granted granted Critical
Publication of DE3434729C2 publication Critical patent/DE3434729C2/de
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/87—Electrodes or interconnections, e.g. leads or terminals
    • H10N30/871—Single-layered electrodes of multilayer piezoelectric or electrostrictive devices, e.g. internal electrodes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/05—Manufacture of multilayered piezoelectric or electrostrictive devices, or parts thereof, e.g. by stacking piezoelectric bodies and electrodes
    • H10N30/053—Manufacture of multilayered piezoelectric or electrostrictive devices, or parts thereof, e.g. by stacking piezoelectric bodies and electrodes by integrally sintering piezoelectric or electrostrictive bodies and electrodes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/50—Piezoelectric or electrostrictive devices having a stacked or multilayer structure

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Compositions Of Oxide Ceramics (AREA)
  • Transducers For Ultrasonic Waves (AREA)
  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
DE19843434729 1984-09-21 1984-09-21 Biegeelement aus piezokeramik und verfahren zu seiner herstellung Granted DE3434729A1 (de)

Priority Applications (2)

Application Number Priority Date Filing Date Title
DE19843434729 DE3434729A1 (de) 1984-09-21 1984-09-21 Biegeelement aus piezokeramik und verfahren zu seiner herstellung
JP60205154A JPS6178180A (ja) 1984-09-21 1985-09-17 圧電セラミツク製たわみ素子とその製法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19843434729 DE3434729A1 (de) 1984-09-21 1984-09-21 Biegeelement aus piezokeramik und verfahren zu seiner herstellung

Publications (2)

Publication Number Publication Date
DE3434729A1 true DE3434729A1 (de) 1986-04-03
DE3434729C2 DE3434729C2 (enrdf_load_stackoverflow) 1990-12-13

Family

ID=6246012

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19843434729 Granted DE3434729A1 (de) 1984-09-21 1984-09-21 Biegeelement aus piezokeramik und verfahren zu seiner herstellung

Country Status (2)

Country Link
JP (1) JPS6178180A (enrdf_load_stackoverflow)
DE (1) DE3434729A1 (enrdf_load_stackoverflow)

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0262248A1 (en) * 1986-10-02 1988-04-06 ATOCHEM NORTH AMERICA, INC. (a Pennsylvania corp.) Means for electrically connecting electrodes on different surfaces of piezoelectric polymeric films
EP0271507A4 (en) * 1986-04-18 1990-01-24 Pennwalt Corp CONNECTIONS FOR USE WITH PIEZOELECTRIC POLYMER FILM CONVERTERS.
DE3824139A1 (de) * 1988-07-15 1990-01-25 Siemens Ag Elektroden fuer piezokeramiken
FR2639086A1 (fr) * 1988-11-17 1990-05-18 Smc Corp Dispositif de clapet a lamelles pour buse ou orifice
DE3940619A1 (de) * 1989-06-09 1990-12-13 Avx Corp Elektrostriktive stellantriebe
DE4031623C1 (enrdf_load_stackoverflow) * 1990-10-05 1992-03-12 Siemens Ag, 8000 Muenchen, De
DE19829216C1 (de) * 1998-06-30 2000-03-02 Fraunhofer Ges Forschung Elektromechanischer Wandler und Verfahren zur Herstellung
EP0926746A3 (en) * 1997-12-25 2002-10-02 Kyocera Corporation Piezoelectric film type actuator and ink jet printer head having the same
EP1193777A3 (en) * 2000-09-28 2005-04-20 Matsushita Electric Industrial Co., Ltd. Method of manufacturing piezoelectric elements using sacrificial material
DE102006022600A1 (de) * 2006-05-15 2007-11-22 Siemens Ag Herstellungsverfahren eines Piezoaktors

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3378704A (en) * 1966-01-05 1968-04-16 Bourns Inc Piezoelectric multilayer device

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3378704A (en) * 1966-01-05 1968-04-16 Bourns Inc Piezoelectric multilayer device

Cited By (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0271507A4 (en) * 1986-04-18 1990-01-24 Pennwalt Corp CONNECTIONS FOR USE WITH PIEZOELECTRIC POLYMER FILM CONVERTERS.
EP0262248A1 (en) * 1986-10-02 1988-04-06 ATOCHEM NORTH AMERICA, INC. (a Pennsylvania corp.) Means for electrically connecting electrodes on different surfaces of piezoelectric polymeric films
DE3824139A1 (de) * 1988-07-15 1990-01-25 Siemens Ag Elektroden fuer piezokeramiken
FR2639086A1 (fr) * 1988-11-17 1990-05-18 Smc Corp Dispositif de clapet a lamelles pour buse ou orifice
DE3940619A1 (de) * 1989-06-09 1990-12-13 Avx Corp Elektrostriktive stellantriebe
DE4031623C1 (enrdf_load_stackoverflow) * 1990-10-05 1992-03-12 Siemens Ag, 8000 Muenchen, De
EP0926746A3 (en) * 1997-12-25 2002-10-02 Kyocera Corporation Piezoelectric film type actuator and ink jet printer head having the same
DE19829216C1 (de) * 1998-06-30 2000-03-02 Fraunhofer Ges Forschung Elektromechanischer Wandler und Verfahren zur Herstellung
US6337835B1 (en) 1998-06-30 2002-01-08 Fraunhofer-Gesellschaft Zur Foerderung Der Angewandten Forschung E.V. Electromechanical converter and method of producing same
EP1193777A3 (en) * 2000-09-28 2005-04-20 Matsushita Electric Industrial Co., Ltd. Method of manufacturing piezoelectric elements using sacrificial material
DE102006022600A1 (de) * 2006-05-15 2007-11-22 Siemens Ag Herstellungsverfahren eines Piezoaktors
DE102006022600B4 (de) * 2006-05-15 2008-02-14 Siemens Ag Herstellungsverfahren eines Piezoaktors

Also Published As

Publication number Publication date
DE3434729C2 (enrdf_load_stackoverflow) 1990-12-13
JPS6178180A (ja) 1986-04-21

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Legal Events

Date Code Title Description
OM8 Search report available as to paragraph 43 lit. 1 sentence 1 patent law
8110 Request for examination paragraph 44
D2 Grant after examination
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee