JPS6177001A - 光反射防止膜 - Google Patents

光反射防止膜

Info

Publication number
JPS6177001A
JPS6177001A JP59198479A JP19847984A JPS6177001A JP S6177001 A JPS6177001 A JP S6177001A JP 59198479 A JP59198479 A JP 59198479A JP 19847984 A JP19847984 A JP 19847984A JP S6177001 A JPS6177001 A JP S6177001A
Authority
JP
Japan
Prior art keywords
layer
refractive index
optical thickness
wavelength
layers
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59198479A
Other languages
English (en)
Japanese (ja)
Other versions
JPH058801B2 (enrdf_load_html_response
Inventor
Yasushi Taniguchi
靖 谷口
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP59198479A priority Critical patent/JPS6177001A/ja
Publication of JPS6177001A publication Critical patent/JPS6177001A/ja
Publication of JPH058801B2 publication Critical patent/JPH058801B2/ja
Granted legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/10Optical coatings produced by application to, or surface treatment of, optical elements
    • G02B1/11Anti-reflection coatings
    • G02B1/113Anti-reflection coatings using inorganic layer materials only
    • G02B1/115Multilayers

Landscapes

  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Surface Treatment Of Optical Elements (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP59198479A 1984-09-25 1984-09-25 光反射防止膜 Granted JPS6177001A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59198479A JPS6177001A (ja) 1984-09-25 1984-09-25 光反射防止膜

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59198479A JPS6177001A (ja) 1984-09-25 1984-09-25 光反射防止膜

Publications (2)

Publication Number Publication Date
JPS6177001A true JPS6177001A (ja) 1986-04-19
JPH058801B2 JPH058801B2 (enrdf_load_html_response) 1993-02-03

Family

ID=16391792

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59198479A Granted JPS6177001A (ja) 1984-09-25 1984-09-25 光反射防止膜

Country Status (1)

Country Link
JP (1) JPS6177001A (enrdf_load_html_response)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6461701A (en) * 1987-09-01 1989-03-08 Minolta Camera Kk Antireflecting film
JPS6461702A (en) * 1987-09-01 1989-03-08 Minolta Camera Kk Antireflecting film
JPH01138501A (ja) * 1987-11-26 1989-05-31 Minolta Camera Co Ltd 反射防止膜
JPH04166901A (ja) * 1990-10-31 1992-06-12 Hoya Corp 反射防止膜を有する光学部品
JPH04191801A (ja) * 1990-11-27 1992-07-10 Hoya Corp 光学部品
JPH09329702A (ja) * 1996-06-10 1997-12-22 Nikon Corp 反射防止膜
US6472087B1 (en) 1997-11-13 2002-10-29 Canon Kabushiki Kaisha Antireflection film, optical element with antireflection film, and production method of the antireflection film

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5040668A (enrdf_load_html_response) * 1973-04-11 1975-04-14
JPS5655901A (en) * 1980-10-09 1981-05-16 Mamiya Koki Kk Antireflection film

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5040668A (enrdf_load_html_response) * 1973-04-11 1975-04-14
JPS5655901A (en) * 1980-10-09 1981-05-16 Mamiya Koki Kk Antireflection film

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6461701A (en) * 1987-09-01 1989-03-08 Minolta Camera Kk Antireflecting film
JPS6461702A (en) * 1987-09-01 1989-03-08 Minolta Camera Kk Antireflecting film
JPH01138501A (ja) * 1987-11-26 1989-05-31 Minolta Camera Co Ltd 反射防止膜
JPH04166901A (ja) * 1990-10-31 1992-06-12 Hoya Corp 反射防止膜を有する光学部品
JPH04191801A (ja) * 1990-11-27 1992-07-10 Hoya Corp 光学部品
JPH09329702A (ja) * 1996-06-10 1997-12-22 Nikon Corp 反射防止膜
US6472087B1 (en) 1997-11-13 2002-10-29 Canon Kabushiki Kaisha Antireflection film, optical element with antireflection film, and production method of the antireflection film

Also Published As

Publication number Publication date
JPH058801B2 (enrdf_load_html_response) 1993-02-03

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term