JPS6461701A - Antireflecting film - Google Patents
Antireflecting filmInfo
- Publication number
- JPS6461701A JPS6461701A JP62218948A JP21894887A JPS6461701A JP S6461701 A JPS6461701 A JP S6461701A JP 62218948 A JP62218948 A JP 62218948A JP 21894887 A JP21894887 A JP 21894887A JP S6461701 A JPS6461701 A JP S6461701A
- Authority
- JP
- Japan
- Prior art keywords
- layers
- refractive index
- film
- substrate
- antireflecting film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
Abstract
PURPOSE:To form an antireflecting film which is effective to a wide range of high- wavelength regions by using the same low-refractive index material to the odd layers of the antireflecting film which is formed of 6 layers and the same intermediate- refractive index material to the even layers in accordance with the specific conditions as the materials for the respective layers of the above-mentioned film. CONSTITUTION:The incident medium of the antireflecting film which is formed of the 6 layers is air and the material of a substrate 7 is CaF2. The low-refractive index material MgF2 which exhibits the refractive index lower than the refractive index of the substrate 7 is used for the odd layers 1, 3, 5 and the LaF3 which is the material different from the above-mentioned material and exhibits the refractive index higher than the refractive index of the substrate 7 is used for the even layers 2, 4, 6. The thicknesses of the respective layers are set at an about 0.3-0.6 lambda0 range in total of the optical film thicknesses of the 4th-6th layers 4, 5, 6 with respect to a designed main wavelength lambda0. The film thicknesses have the prescribed range or value as a standard and the antireflection effect is lowered when the permissible range is exceeded. As a result, the respective layers are constituted of two kinds of the materials and the antireflecting film effective to a wide range of the wavelength regions is obtd.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62218948A JP2586509B2 (en) | 1987-09-01 | 1987-09-01 | Anti-reflective coating |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62218948A JP2586509B2 (en) | 1987-09-01 | 1987-09-01 | Anti-reflective coating |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6461701A true JPS6461701A (en) | 1989-03-08 |
JP2586509B2 JP2586509B2 (en) | 1997-03-05 |
Family
ID=16727843
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP62218948A Expired - Lifetime JP2586509B2 (en) | 1987-09-01 | 1987-09-01 | Anti-reflective coating |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP2586509B2 (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH04333834A (en) * | 1991-05-09 | 1992-11-20 | Sumitomo Metal Mining Co Ltd | Antireflection film consisting of multilayered dielectric films |
WO2012029744A1 (en) * | 2010-09-02 | 2012-03-08 | オリンパス株式会社 | Reflection-blocking film, lens, optical assembly, objective lens, and optical apparatus |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58221811A (en) * | 1982-06-17 | 1983-12-23 | Fuji Photo Optical Co Ltd | Heat-resistant antireflection film |
JPS6177001A (en) * | 1984-09-25 | 1986-04-19 | Canon Inc | Optical antireflecting film |
JPS6177002A (en) * | 1984-09-25 | 1986-04-19 | Canon Inc | Optical antireflecting film |
-
1987
- 1987-09-01 JP JP62218948A patent/JP2586509B2/en not_active Expired - Lifetime
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58221811A (en) * | 1982-06-17 | 1983-12-23 | Fuji Photo Optical Co Ltd | Heat-resistant antireflection film |
JPS6177001A (en) * | 1984-09-25 | 1986-04-19 | Canon Inc | Optical antireflecting film |
JPS6177002A (en) * | 1984-09-25 | 1986-04-19 | Canon Inc | Optical antireflecting film |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH04333834A (en) * | 1991-05-09 | 1992-11-20 | Sumitomo Metal Mining Co Ltd | Antireflection film consisting of multilayered dielectric films |
WO2012029744A1 (en) * | 2010-09-02 | 2012-03-08 | オリンパス株式会社 | Reflection-blocking film, lens, optical assembly, objective lens, and optical apparatus |
JP2012053329A (en) * | 2010-09-02 | 2012-03-15 | Olympus Corp | Antireflection film, lens, optical system, objective lens, and optical instrument |
Also Published As
Publication number | Publication date |
---|---|
JP2586509B2 (en) | 1997-03-05 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JPS57181503A (en) | Heat ray reflecting film | |
JPS56138701A (en) | Antireflection film | |
WO1995022083A3 (en) | Photomask blanks | |
JPS55101922A (en) | Light splitter | |
JPS5536886A (en) | Telephoto lens | |
JPS55151601A (en) | Pentagonal prism for camera finder | |
JPS6461702A (en) | Antireflecting film | |
JPS6461701A (en) | Antireflecting film | |
US3809459A (en) | Antireflection coating for an inner surface of cemented lenses | |
JPS57100404A (en) | Stripe filter | |
JPS5498257A (en) | Aspherical antireflection film | |
JPS5632104A (en) | Light reflecting display optical fiber | |
JPS5559406A (en) | Color separating filter | |
JPS57150152A (en) | Optical disc | |
JPS53110541A (en) | Half mirror | |
JPS56137317A (en) | Interference polarizer of multireflection light | |
JPS5453549A (en) | Multilayer thin film optical system | |
JPS56102801A (en) | Reflection preventing film | |
JPS56101123A (en) | Optical switch | |
JPS646905A (en) | Laser light reflecting filter | |
JPS5647012A (en) | Fabry-perot etalon | |
JPS5692504A (en) | Optical filter | |
JPS5655901A (en) | Antireflection film | |
JPS5714812A (en) | Optical system for copying machine | |
ATE140803T1 (en) | ORGANIC NON-LINEAR OPTICAL CRYSTAL WITH A LAYERED STRUCTURE AND ITS PRODUCTION |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
EXPY | Cancellation because of completion of term | ||
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20071205 Year of fee payment: 11 |