JPS6171954A - カツプ型砥石による研削方法 - Google Patents

カツプ型砥石による研削方法

Info

Publication number
JPS6171954A
JPS6171954A JP19157584A JP19157584A JPS6171954A JP S6171954 A JPS6171954 A JP S6171954A JP 19157584 A JP19157584 A JP 19157584A JP 19157584 A JP19157584 A JP 19157584A JP S6171954 A JPS6171954 A JP S6171954A
Authority
JP
Japan
Prior art keywords
grinding
wafer
wheel
cup
grindstone
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP19157584A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0327341B2 (enrdf_load_stackoverflow
Inventor
Tsuneo Uchiyama
内山　恒夫
Takashi Katagiri
孝 片桐
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Via Mechanics Ltd
Original Assignee
Hitachi Seiko Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Seiko Ltd filed Critical Hitachi Seiko Ltd
Priority to JP19157584A priority Critical patent/JPS6171954A/ja
Publication of JPS6171954A publication Critical patent/JPS6171954A/ja
Publication of JPH0327341B2 publication Critical patent/JPH0327341B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Grinding Of Cylindrical And Plane Surfaces (AREA)
JP19157584A 1984-09-14 1984-09-14 カツプ型砥石による研削方法 Granted JPS6171954A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19157584A JPS6171954A (ja) 1984-09-14 1984-09-14 カツプ型砥石による研削方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19157584A JPS6171954A (ja) 1984-09-14 1984-09-14 カツプ型砥石による研削方法

Publications (2)

Publication Number Publication Date
JPS6171954A true JPS6171954A (ja) 1986-04-12
JPH0327341B2 JPH0327341B2 (enrdf_load_stackoverflow) 1991-04-15

Family

ID=16276941

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19157584A Granted JPS6171954A (ja) 1984-09-14 1984-09-14 カツプ型砥石による研削方法

Country Status (1)

Country Link
JP (1) JPS6171954A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1082936C (zh) * 1994-10-18 2002-04-17 加利福尼亚大学董事会 制备材料阵列的方法和材料阵列

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1082936C (zh) * 1994-10-18 2002-04-17 加利福尼亚大学董事会 制备材料阵列的方法和材料阵列

Also Published As

Publication number Publication date
JPH0327341B2 (enrdf_load_stackoverflow) 1991-04-15

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