JPS6165449A - 半導体装置の製造方法 - Google Patents

半導体装置の製造方法

Info

Publication number
JPS6165449A
JPS6165449A JP59188404A JP18840484A JPS6165449A JP S6165449 A JPS6165449 A JP S6165449A JP 59188404 A JP59188404 A JP 59188404A JP 18840484 A JP18840484 A JP 18840484A JP S6165449 A JPS6165449 A JP S6165449A
Authority
JP
Japan
Prior art keywords
insulating film
epitaxial layer
silicon
film
semiconductor device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59188404A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0158660B2 (enExample
Inventor
Shiro Hine
日根　史郎
Masao Yamawaki
正雄 山脇
Naoki Yuya
直毅 油谷
Masafumi Ueno
雅史 上野
Satoshi Yamakawa
聡 山川
Masaaki Kimata
雅章 木股
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP59188404A priority Critical patent/JPS6165449A/ja
Publication of JPS6165449A publication Critical patent/JPS6165449A/ja
Publication of JPH0158660B2 publication Critical patent/JPH0158660B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10W10/00—
    • H10W10/01—

Landscapes

  • Element Separation (AREA)
JP59188404A 1984-09-07 1984-09-07 半導体装置の製造方法 Granted JPS6165449A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59188404A JPS6165449A (ja) 1984-09-07 1984-09-07 半導体装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59188404A JPS6165449A (ja) 1984-09-07 1984-09-07 半導体装置の製造方法

Publications (2)

Publication Number Publication Date
JPS6165449A true JPS6165449A (ja) 1986-04-04
JPH0158660B2 JPH0158660B2 (enExample) 1989-12-13

Family

ID=16223050

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59188404A Granted JPS6165449A (ja) 1984-09-07 1984-09-07 半導体装置の製造方法

Country Status (1)

Country Link
JP (1) JPS6165449A (enExample)

Also Published As

Publication number Publication date
JPH0158660B2 (enExample) 1989-12-13

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