JPS6160413B2 - - Google Patents

Info

Publication number
JPS6160413B2
JPS6160413B2 JP20779985A JP20779985A JPS6160413B2 JP S6160413 B2 JPS6160413 B2 JP S6160413B2 JP 20779985 A JP20779985 A JP 20779985A JP 20779985 A JP20779985 A JP 20779985A JP S6160413 B2 JPS6160413 B2 JP S6160413B2
Authority
JP
Japan
Prior art keywords
image
image sensor
focus
sample
output
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP20779985A
Other languages
English (en)
Japanese (ja)
Other versions
JPS61143709A (ja
Inventor
Masashi Okada
Juji Akyama
Koji Kawada
Atsushi Kawahara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Original Assignee
Nippon Kogaku KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Kogaku KK filed Critical Nippon Kogaku KK
Priority to JP20779985A priority Critical patent/JPS61143709A/ja
Publication of JPS61143709A publication Critical patent/JPS61143709A/ja
Publication of JPS6160413B2 publication Critical patent/JPS6160413B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/24—Base structure
    • G02B21/241—Devices for focusing
    • G02B21/245—Devices for focusing using auxiliary sources, detectors
    • G02B21/247—Differential detectors

Landscapes

  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Microscoopes, Condenser (AREA)
  • Automatic Focus Adjustment (AREA)
JP20779985A 1985-09-21 1985-09-21 焦点調節装置 Granted JPS61143709A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP20779985A JPS61143709A (ja) 1985-09-21 1985-09-21 焦点調節装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20779985A JPS61143709A (ja) 1985-09-21 1985-09-21 焦点調節装置

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP14968678A Division JPS5576310A (en) 1978-12-05 1978-12-05 Automatic focusing device

Publications (2)

Publication Number Publication Date
JPS61143709A JPS61143709A (ja) 1986-07-01
JPS6160413B2 true JPS6160413B2 (https=) 1986-12-20

Family

ID=16545683

Family Applications (1)

Application Number Title Priority Date Filing Date
JP20779985A Granted JPS61143709A (ja) 1985-09-21 1985-09-21 焦点調節装置

Country Status (1)

Country Link
JP (1) JPS61143709A (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6974938B1 (en) 2000-03-08 2005-12-13 Tibotec Bvba Microscope having a stable autofocusing apparatus

Also Published As

Publication number Publication date
JPS61143709A (ja) 1986-07-01

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