JPS6113722B2 - - Google Patents

Info

Publication number
JPS6113722B2
JPS6113722B2 JP53149686A JP14968678A JPS6113722B2 JP S6113722 B2 JPS6113722 B2 JP S6113722B2 JP 53149686 A JP53149686 A JP 53149686A JP 14968678 A JP14968678 A JP 14968678A JP S6113722 B2 JPS6113722 B2 JP S6113722B2
Authority
JP
Japan
Prior art keywords
image
image sensor
sample
output
focus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP53149686A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5576310A (en
Inventor
Masashi Okada
Juji Akyama
Koji Kawada
Atsushi Kawahara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Original Assignee
Nippon Kogaku KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Kogaku KK filed Critical Nippon Kogaku KK
Priority to JP14968678A priority Critical patent/JPS5576310A/ja
Priority to US06/100,007 priority patent/US4311904A/en
Publication of JPS5576310A publication Critical patent/JPS5576310A/ja
Publication of JPS6113722B2 publication Critical patent/JPS6113722B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/24—Base structure
    • G02B21/241—Devices for focusing
    • G02B21/245—Devices for focusing using auxiliary sources, detectors
    • G02B21/247—Differential detectors

Landscapes

  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Automatic Focus Adjustment (AREA)
  • Microscoopes, Condenser (AREA)
JP14968678A 1978-12-05 1978-12-05 Automatic focusing device Granted JPS5576310A (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP14968678A JPS5576310A (en) 1978-12-05 1978-12-05 Automatic focusing device
US06/100,007 US4311904A (en) 1978-12-05 1979-12-04 Automatic focus adjusting device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14968678A JPS5576310A (en) 1978-12-05 1978-12-05 Automatic focusing device

Related Child Applications (2)

Application Number Title Priority Date Filing Date
JP20779985A Division JPS61143709A (ja) 1985-09-21 1985-09-21 焦点調節装置
JP20780085A Division JPS61143710A (ja) 1985-09-21 1985-09-21 焦点調節装置

Publications (2)

Publication Number Publication Date
JPS5576310A JPS5576310A (en) 1980-06-09
JPS6113722B2 true JPS6113722B2 (https=) 1986-04-15

Family

ID=15480590

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14968678A Granted JPS5576310A (en) 1978-12-05 1978-12-05 Automatic focusing device

Country Status (2)

Country Link
US (1) US4311904A (https=)
JP (1) JPS5576310A (https=)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3131053C2 (de) * 1980-08-07 1983-12-29 Asahi Kogaku Kogyo K.K., Tokyo Automatische Fokussierungsermittlungseinrichtung für eine Kamera
US4635126A (en) * 1981-12-18 1987-01-06 Canon Kabushiki Kaisha Image pick-up system
JPS597321A (ja) * 1982-07-02 1984-01-14 Nippon Kogaku Kk <Nikon> 高精度なピントずれ検出装置
JPS5910914A (ja) * 1982-07-12 1984-01-20 Nippon Kogaku Kk <Nikon> 焦点検出装置
JPS5994720A (ja) * 1982-11-22 1984-05-31 Olympus Optical Co Ltd 合焦検出装置
US4645338A (en) * 1985-04-26 1987-02-24 International Business Machines Corporation Optical system for focus correction for a lithographic tool
JPH0353209Y2 (https=) * 1985-08-07 1991-11-20
JPH041545Y2 (https=) * 1986-04-26 1992-01-20
FR2605751A1 (fr) * 1986-10-22 1988-04-29 Bioconcept Sarl Dispositif pour la mise au point automatique d'un microscope
JPH0760209B2 (ja) * 1987-10-15 1995-06-28 キヤノン株式会社 オートフオーカス装置
DE69231269T2 (de) * 1991-03-29 2001-02-01 Olympus Optical Co., Ltd. Vorrichtung zum ermitteln der automatischen fokussierung
JP3458017B2 (ja) * 1994-12-28 2003-10-20 オリンパス光学工業株式会社 顕微鏡自動焦点位置検出装置
US6974938B1 (en) * 2000-03-08 2005-12-13 Tibotec Bvba Microscope having a stable autofocusing apparatus
TWI406025B (zh) 2010-11-25 2013-08-21 Ind Tech Res Inst 自動聚焦裝置及方法
JP5951211B2 (ja) * 2011-10-04 2016-07-13 オリンパス株式会社 合焦制御装置及び内視鏡装置
JP6336718B2 (ja) * 2013-07-01 2018-06-06 株式会社ミツトヨ オートフォーカス装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54145133A (en) * 1978-05-02 1979-11-13 Asahi Optical Co Ltd Focus detector

Also Published As

Publication number Publication date
JPS5576310A (en) 1980-06-09
US4311904A (en) 1982-01-19

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