JPS6159669B2 - - Google Patents

Info

Publication number
JPS6159669B2
JPS6159669B2 JP54076127A JP7612779A JPS6159669B2 JP S6159669 B2 JPS6159669 B2 JP S6159669B2 JP 54076127 A JP54076127 A JP 54076127A JP 7612779 A JP7612779 A JP 7612779A JP S6159669 B2 JPS6159669 B2 JP S6159669B2
Authority
JP
Japan
Prior art keywords
film
poly
sio
gate
source
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP54076127A
Other languages
English (en)
Japanese (ja)
Other versions
JPS561572A (en
Inventor
Eizo Fujii
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP7612779A priority Critical patent/JPS561572A/ja
Publication of JPS561572A publication Critical patent/JPS561572A/ja
Publication of JPS6159669B2 publication Critical patent/JPS6159669B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/60—Insulated-gate field-effect transistors [IGFET]

Landscapes

  • Electrodes Of Semiconductors (AREA)
JP7612779A 1979-06-15 1979-06-15 Manufacture of semiconductor device Granted JPS561572A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7612779A JPS561572A (en) 1979-06-15 1979-06-15 Manufacture of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7612779A JPS561572A (en) 1979-06-15 1979-06-15 Manufacture of semiconductor device

Publications (2)

Publication Number Publication Date
JPS561572A JPS561572A (en) 1981-01-09
JPS6159669B2 true JPS6159669B2 (enrdf_load_stackoverflow) 1986-12-17

Family

ID=13596257

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7612779A Granted JPS561572A (en) 1979-06-15 1979-06-15 Manufacture of semiconductor device

Country Status (1)

Country Link
JP (1) JPS561572A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6350497A (ja) * 1986-08-18 1988-03-03 Crown Denken:Kk チタン材の彩色方法

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2596795B2 (ja) * 1988-06-20 1997-04-02 富士通株式会社 半導体装置の製造方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6350497A (ja) * 1986-08-18 1988-03-03 Crown Denken:Kk チタン材の彩色方法

Also Published As

Publication number Publication date
JPS561572A (en) 1981-01-09

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