JPS6159244B2 - - Google Patents

Info

Publication number
JPS6159244B2
JPS6159244B2 JP56070479A JP7047981A JPS6159244B2 JP S6159244 B2 JPS6159244 B2 JP S6159244B2 JP 56070479 A JP56070479 A JP 56070479A JP 7047981 A JP7047981 A JP 7047981A JP S6159244 B2 JPS6159244 B2 JP S6159244B2
Authority
JP
Japan
Prior art keywords
silicon nitride
silicon
thin film
base material
nitride layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP56070479A
Other languages
English (en)
Japanese (ja)
Other versions
JPS57188409A (en
Inventor
Yukitoshi Matsuo
Yasuhiro Imanishi
Hideo Nagashima
Masaharu Watanabe
Toshiro Usami
Hisashi Muraoka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Coorstek KK
Toshiba Corp
Original Assignee
Toshiba Corp
Toshiba Ceramics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Toshiba Ceramics Co Ltd filed Critical Toshiba Corp
Priority to JP56070479A priority Critical patent/JPS57188409A/ja
Priority to US06/368,440 priority patent/US4515755A/en
Priority to EP82103457A priority patent/EP0065122B1/en
Priority to DE8282103457T priority patent/DE3280107D1/de
Publication of JPS57188409A publication Critical patent/JPS57188409A/ja
Publication of JPS6159244B2 publication Critical patent/JPS6159244B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Manufacturing Of Tubular Articles Or Embedded Moulded Articles (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Chemical Vapour Deposition (AREA)
  • Formation Of Insulating Films (AREA)
  • Ceramic Products (AREA)
JP56070479A 1981-05-11 1981-05-11 Manufacture of high density silicon nitride Granted JPS57188409A (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP56070479A JPS57188409A (en) 1981-05-11 1981-05-11 Manufacture of high density silicon nitride
US06/368,440 US4515755A (en) 1981-05-11 1982-04-14 Apparatus for producing a silicon single crystal from a silicon melt
EP82103457A EP0065122B1 (en) 1981-05-11 1982-04-23 Device made of silicon nitride for pulling single crystal of silicon and method of manufacturing the same
DE8282103457T DE3280107D1 (de) 1981-05-11 1982-04-23 Vorrichtungsteil aus siliziumnitrid zum ziehen von einkristallinem silizium und verfahren zu seiner herstellung.

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56070479A JPS57188409A (en) 1981-05-11 1981-05-11 Manufacture of high density silicon nitride

Publications (2)

Publication Number Publication Date
JPS57188409A JPS57188409A (en) 1982-11-19
JPS6159244B2 true JPS6159244B2 (enExample) 1986-12-15

Family

ID=13432692

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56070479A Granted JPS57188409A (en) 1981-05-11 1981-05-11 Manufacture of high density silicon nitride

Country Status (1)

Country Link
JP (1) JPS57188409A (enExample)

Also Published As

Publication number Publication date
JPS57188409A (en) 1982-11-19

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