JPS6156164B2 - - Google Patents
Info
- Publication number
- JPS6156164B2 JPS6156164B2 JP57041931A JP4193182A JPS6156164B2 JP S6156164 B2 JPS6156164 B2 JP S6156164B2 JP 57041931 A JP57041931 A JP 57041931A JP 4193182 A JP4193182 A JP 4193182A JP S6156164 B2 JPS6156164 B2 JP S6156164B2
- Authority
- JP
- Japan
- Prior art keywords
- reaction
- silicon
- trichlorosilane
- copper
- silicon tetrachloride
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000006243 chemical reaction Methods 0.000 claims description 46
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 22
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 22
- ZDHXKXAHOVTTAH-UHFFFAOYSA-N trichlorosilane Chemical compound Cl[SiH](Cl)Cl ZDHXKXAHOVTTAH-UHFFFAOYSA-N 0.000 claims description 22
- 239000005052 trichlorosilane Substances 0.000 claims description 22
- 229910052802 copper Inorganic materials 0.000 claims description 21
- 239000010949 copper Substances 0.000 claims description 21
- VXEGSRKPIUDPQT-UHFFFAOYSA-N 4-[4-(4-methoxyphenyl)piperazin-1-yl]aniline Chemical compound C1=CC(OC)=CC=C1N1CCN(C=2C=CC(N)=CC=2)CC1 VXEGSRKPIUDPQT-UHFFFAOYSA-N 0.000 claims description 18
- 239000005049 silicon tetrachloride Substances 0.000 claims description 18
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 11
- 239000007789 gas Substances 0.000 claims description 9
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 claims description 5
- 230000003197 catalytic effect Effects 0.000 claims description 5
- 229910000041 hydrogen chloride Inorganic materials 0.000 claims description 5
- IXCSERBJSXMMFS-UHFFFAOYSA-N hydrogen chloride Substances Cl.Cl IXCSERBJSXMMFS-UHFFFAOYSA-N 0.000 claims description 5
- 238000004519 manufacturing process Methods 0.000 claims description 4
- 239000011863 silicon-based powder Substances 0.000 claims description 4
- 239000012530 fluid Substances 0.000 claims description 3
- 229910052710 silicon Inorganic materials 0.000 description 14
- 239000010703 silicon Substances 0.000 description 14
- 239000003054 catalyst Substances 0.000 description 8
- 238000000034 method Methods 0.000 description 8
- 229910052751 metal Inorganic materials 0.000 description 7
- 239000002184 metal Substances 0.000 description 7
- 229910003902 SiCl 4 Inorganic materials 0.000 description 3
- 238000009826 distribution Methods 0.000 description 3
- 230000005484 gravity Effects 0.000 description 3
- 239000000203 mixture Substances 0.000 description 3
- 229910021591 Copper(I) chloride Inorganic materials 0.000 description 2
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- OXBLHERUFWYNTN-UHFFFAOYSA-M copper(I) chloride Chemical compound [Cu]Cl OXBLHERUFWYNTN-UHFFFAOYSA-M 0.000 description 2
- 229940045803 cuprous chloride Drugs 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 238000005243 fluidization Methods 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 229910001220 stainless steel Inorganic materials 0.000 description 2
- 239000010935 stainless steel Substances 0.000 description 2
- OYPRJOBELJOOCE-UHFFFAOYSA-N Calcium Chemical compound [Ca] OYPRJOBELJOOCE-UHFFFAOYSA-N 0.000 description 1
- 239000005046 Chlorosilane Substances 0.000 description 1
- 235000021355 Stearic acid Nutrition 0.000 description 1
- 230000003213 activating effect Effects 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 239000006227 byproduct Substances 0.000 description 1
- 229910052791 calcium Inorganic materials 0.000 description 1
- 239000011575 calcium Substances 0.000 description 1
- 239000004568 cement Substances 0.000 description 1
- KOPOQZFJUQMUML-UHFFFAOYSA-N chlorosilane Chemical compound Cl[SiH3] KOPOQZFJUQMUML-UHFFFAOYSA-N 0.000 description 1
- SLLGVCUQYRMELA-UHFFFAOYSA-N chlorosilicon Chemical compound Cl[Si] SLLGVCUQYRMELA-UHFFFAOYSA-N 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000011038 discontinuous diafiltration by volume reduction Methods 0.000 description 1
- 238000005868 electrolysis reaction Methods 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 238000006011 modification reaction Methods 0.000 description 1
- QIQXTHQIDYTFRH-UHFFFAOYSA-N octadecanoic acid Chemical compound CCCCCCCCCCCCCCCCCC(O)=O QIQXTHQIDYTFRH-UHFFFAOYSA-N 0.000 description 1
- OQCDKBAXFALNLD-UHFFFAOYSA-N octadecanoic acid Natural products CCCCCCCC(C)CCCCCCCCC(O)=O OQCDKBAXFALNLD-UHFFFAOYSA-N 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 238000004064 recycling Methods 0.000 description 1
- 238000006722 reduction reaction Methods 0.000 description 1
- 230000000717 retained effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- 239000008117 stearic acid Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Landscapes
- Silicon Compounds (AREA)
- Catalysts (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57041931A JPS58161915A (ja) | 1982-03-17 | 1982-03-17 | トリクロロシランの製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57041931A JPS58161915A (ja) | 1982-03-17 | 1982-03-17 | トリクロロシランの製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS58161915A JPS58161915A (ja) | 1983-09-26 |
| JPS6156164B2 true JPS6156164B2 (de) | 1986-12-01 |
Family
ID=12621973
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP57041931A Granted JPS58161915A (ja) | 1982-03-17 | 1982-03-17 | トリクロロシランの製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58161915A (de) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103007995A (zh) * | 2012-12-17 | 2013-04-03 | 四川大学 | 一种用于催化氢化四氯化硅制备三氯氢硅的复合催化剂 |
| CN103723734A (zh) * | 2012-10-10 | 2014-04-16 | 浙江昱辉阳光能源有限公司 | 一种制备三氯氢硅的工艺 |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6197128A (ja) * | 1984-10-19 | 1986-05-15 | Denki Kagaku Kogyo Kk | シラン化合物の連続的製造法 |
| JPS63233007A (ja) * | 1987-03-23 | 1988-09-28 | Mitsubishi Metal Corp | クロロポリシランの製造方法 |
| DE10061682A1 (de) * | 2000-12-11 | 2002-07-04 | Solarworld Ag | Verfahren zur Herstellung von Reinstsilicium |
| CN101189245B (zh) * | 2005-03-09 | 2012-06-13 | 瑞科硅公司 | 制备氢氯硅烷的方法 |
| JP5542026B2 (ja) | 2010-10-27 | 2014-07-09 | 信越化学工業株式会社 | クロロシラン類の精製方法 |
| AU2012209345A1 (en) * | 2011-01-25 | 2013-06-13 | Dow Corning Corporation | Method of preparing a diorganodihalosilane |
| JP5507498B2 (ja) * | 2011-06-21 | 2014-05-28 | 信越化学工業株式会社 | クロロシラン類の精製方法 |
| KR101519498B1 (ko) * | 2013-06-19 | 2015-05-12 | 한화케미칼 주식회사 | 트리클로로실란의 제조방법 |
-
1982
- 1982-03-17 JP JP57041931A patent/JPS58161915A/ja active Granted
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103723734A (zh) * | 2012-10-10 | 2014-04-16 | 浙江昱辉阳光能源有限公司 | 一种制备三氯氢硅的工艺 |
| CN103007995A (zh) * | 2012-12-17 | 2013-04-03 | 四川大学 | 一种用于催化氢化四氯化硅制备三氯氢硅的复合催化剂 |
| CN103007995B (zh) * | 2012-12-17 | 2015-08-12 | 四川大学 | 一种用于催化氢化四氯化硅制备三氯氢硅的复合催化剂 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS58161915A (ja) | 1983-09-26 |
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