JPS6152980B2 - - Google Patents

Info

Publication number
JPS6152980B2
JPS6152980B2 JP55130482A JP13048280A JPS6152980B2 JP S6152980 B2 JPS6152980 B2 JP S6152980B2 JP 55130482 A JP55130482 A JP 55130482A JP 13048280 A JP13048280 A JP 13048280A JP S6152980 B2 JPS6152980 B2 JP S6152980B2
Authority
JP
Japan
Prior art keywords
film
region
cvd
oxidation
element region
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP55130482A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5754342A (en
Inventor
Shinji Taguchi
Kazuya Shibazaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP55130482A priority Critical patent/JPS5754342A/ja
Publication of JPS5754342A publication Critical patent/JPS5754342A/ja
Publication of JPS6152980B2 publication Critical patent/JPS6152980B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10W10/011—
    • H10W10/10—

Landscapes

  • Element Separation (AREA)
JP55130482A 1980-09-19 1980-09-19 Manufacture of semiconductor device Granted JPS5754342A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP55130482A JPS5754342A (en) 1980-09-19 1980-09-19 Manufacture of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP55130482A JPS5754342A (en) 1980-09-19 1980-09-19 Manufacture of semiconductor device

Publications (2)

Publication Number Publication Date
JPS5754342A JPS5754342A (en) 1982-03-31
JPS6152980B2 true JPS6152980B2 (enExample) 1986-11-15

Family

ID=15035303

Family Applications (1)

Application Number Title Priority Date Filing Date
JP55130482A Granted JPS5754342A (en) 1980-09-19 1980-09-19 Manufacture of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5754342A (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58175842A (ja) * 1982-04-08 1983-10-15 Matsushita Electric Ind Co Ltd 半導体装置の製造方法
EP0764980A1 (en) * 1995-09-20 1997-03-26 Lucent Technologies Inc. Improved local oxidation of silicon

Also Published As

Publication number Publication date
JPS5754342A (en) 1982-03-31

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