JPS5754342A - Manufacture of semiconductor device - Google Patents

Manufacture of semiconductor device

Info

Publication number
JPS5754342A
JPS5754342A JP55130482A JP13048280A JPS5754342A JP S5754342 A JPS5754342 A JP S5754342A JP 55130482 A JP55130482 A JP 55130482A JP 13048280 A JP13048280 A JP 13048280A JP S5754342 A JPS5754342 A JP S5754342A
Authority
JP
Japan
Prior art keywords
film
silicon layer
oxide films
si3n4
field
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP55130482A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6152980B2 (enExample
Inventor
Shinji Taguchi
Kazuya Shibazaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP55130482A priority Critical patent/JPS5754342A/ja
Publication of JPS5754342A publication Critical patent/JPS5754342A/ja
Publication of JPS6152980B2 publication Critical patent/JPS6152980B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10W10/011—
    • H10W10/10—

Landscapes

  • Element Separation (AREA)
JP55130482A 1980-09-19 1980-09-19 Manufacture of semiconductor device Granted JPS5754342A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP55130482A JPS5754342A (en) 1980-09-19 1980-09-19 Manufacture of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP55130482A JPS5754342A (en) 1980-09-19 1980-09-19 Manufacture of semiconductor device

Publications (2)

Publication Number Publication Date
JPS5754342A true JPS5754342A (en) 1982-03-31
JPS6152980B2 JPS6152980B2 (enExample) 1986-11-15

Family

ID=15035303

Family Applications (1)

Application Number Title Priority Date Filing Date
JP55130482A Granted JPS5754342A (en) 1980-09-19 1980-09-19 Manufacture of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5754342A (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58175842A (ja) * 1982-04-08 1983-10-15 Matsushita Electric Ind Co Ltd 半導体装置の製造方法
EP0764980A1 (en) * 1995-09-20 1997-03-26 Lucent Technologies Inc. Improved local oxidation of silicon

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58175842A (ja) * 1982-04-08 1983-10-15 Matsushita Electric Ind Co Ltd 半導体装置の製造方法
EP0764980A1 (en) * 1995-09-20 1997-03-26 Lucent Technologies Inc. Improved local oxidation of silicon

Also Published As

Publication number Publication date
JPS6152980B2 (enExample) 1986-11-15

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